Original language | Undefined |
---|---|
Title of host publication | Proceedings of the 9th International Micromachine/Nanotech Symposium |
Place of Publication | Tokyo, Japan |
Pages | 59-65 |
Number of pages | 7 |
Publication status | Published - 13 Nov 2003 |
Event | 9th International Micromachine/Nanotech Symposium 2003: Foundation of Industrial Technology in the 21st Century - Science Museum, Kitanomaru Park, Tokyo, Japan Duration: 13 Nov 2003 → 13 Nov 2003 |
Conference
Conference | 9th International Micromachine/Nanotech Symposium 2003 |
---|---|
Country | Japan |
City | Tokyo |
Period | 13/11/03 → 13/11/03 |
Keywords
- METIS-213976
- IR-46067