Nanochannels in SU-8 with floor and ceiling metal electrodes and integrated microchannels

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Abstract

Sacrificially etched 2-D nanofluidic channels and nanospaces with integrated floor and ceiling electrodes and arbitrary channel geometries have been demonstrated with channel heights from 20 nm to 400 nm, widths from 800 nm to 40 mm, and lengths up to 3 mm, using SU-8 as the channel structural material
Original languageEnglish
Pages (from-to)173-175
Number of pages3
JournalLab on a chip
Volume8
Issue number2008
DOIs
Publication statusPublished - 2008

Keywords

  • METIS-245015
  • EWI-13014
  • IR-59069

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