Nanoimprint Lithography for Nanophotonics in Silicon

C.M. Bruinink, Matteo Burresi, M. Burresi, Meint J. de Boer, Franciscus B. Segerink, Henricus V. Jansen, Johan W. Berenschot, David Reinhoudt, Jurriaan Huskens, L. Kuipers

Research output: Contribution to journal › Article › Academic › peer-review

20 Citations (Scopus)
16 Downloads (Pure)

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