Nanolithography on silicon

N. Kramer

Research output: Thesis › PhD Thesis - Research UT, graduation external

Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Pals, J.A., Supervisor
  • Schönenberger, Christian, Supervisor, External person
  • Zandvliet, H.J.W., Co-Supervisor
Award date20 Sept 1996
Print ISBNs90-9009771-6
Publication statusPublished - 20 Sept 1996

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