Nanolithography on silicon

N. Kramer

Research output: Thesis › PhD Thesis - Research UT, graduation external

Original languageEnglish
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Pals, J.A., Supervisor
  • Schonenberger, C., Supervisor, External person
  • Zandvliet, H.J.W., Advisor
Award date20 Sep 1996
Print ISBNs90-9009771-6
Publication statusPublished - 20 Sep 1996

Keywords

  • METIS-128294

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