Nanolithography on silicon

N. Kramer

Research output: ThesisPhD Thesis - Research UT, graduation externalAcademic

Original languageEnglish
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Pals, J.A., Supervisor
  • Schonenberger, C., Supervisor
  • Zandvliet, H.J.W., Advisor
Award date20 Sep 1996
Print ISBNs90-9009771-6
Publication statusPublished - 20 Sep 1996

Keywords

  • METIS-128294

Cite this

Kramer, N. (1996). Nanolithography on silicon.
Kramer, N.. / Nanolithography on silicon. 1996. 108 p.
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language = "English",
isbn = "90-9009771-6",
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Kramer, N 1996, 'Nanolithography on silicon', University of Twente.

Nanolithography on silicon. / Kramer, N.

1996. 108 p.

Research output: ThesisPhD Thesis - Research UT, graduation externalAcademic

TY - THES

T1 - Nanolithography on silicon

AU - Kramer, N.

PY - 1996/9/20

Y1 - 1996/9/20

KW - METIS-128294

M3 - PhD Thesis - Research UT, graduation external

SN - 90-9009771-6

ER -

Kramer N. Nanolithography on silicon. 1996. 108 p.