Original language | English |
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Qualification | Doctor of Philosophy |
Awarding Institution |
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Supervisors/Advisors |
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Award date | 20 Sept 1996 |
Print ISBNs | 90-9009771-6 |
Publication status | Published - 20 Sept 1996 |
Nanolithography on silicon
N. Kramer
Research output: Thesis › PhD Thesis - Research UT, graduation external