Nanomechanical optical devices fabricated with aligned wafer bonding

C. Gui; G.J. Veldhuis; T.M. Koster; Paul Lambeck; Johan W. Berenschot; Johannes G.E. Gardeniers; Michael Curt Elwenspoek

Nanomechanical optical devices fabricated with aligned wafer bonding

C. Gui, G.J. Veldhuis, T.M. Koster, Paul Lambeck, Johan W. Berenschot, Johannes G.E. Gardeniers, Michael Curt Elwenspoek

Research output: Other contribution › Other research output

Original language	Undefined
Place of Publication	Enschede
Publication status	Published - 23 Jun 1998

Keywords

METIS-114616

Cite this

@misc{85a48d6354fc4d5a86c4d5c68d2a6f05,

title = "Nanomechanical optical devices fabricated with aligned wafer bonding",

keywords = "METIS-114616",

author = "C. Gui and G.J. Veldhuis and T.M. Koster and Paul Lambeck and Berenschot, {Johan W.} and Gardeniers, {Johannes G.E.} and Elwenspoek, {Michael Curt}",

year = "1998",

month = jun,

day = "23",

language = "Undefined",

type = "Other",

}