Nanomechanical optical devices fabricated with aligned wafer bonding

C. Gui, G.J. Veldhuis, T.M. Koster, Paul Lambeck, Johan W. Berenschot, Johannes G.E. Gardeniers, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationEnschede
    Publication statusPublished - 23 Jun 1998

    Keywords

    • METIS-114616

    Cite this

    @misc{85a48d6354fc4d5a86c4d5c68d2a6f05,
    title = "Nanomechanical optical devices fabricated with aligned wafer bonding",
    keywords = "METIS-114616",
    author = "C. Gui and G.J. Veldhuis and T.M. Koster and Paul Lambeck and Berenschot, {Johan W.} and Gardeniers, {Johannes G.E.} and Elwenspoek, {Michael Curt}",
    year = "1998",
    month = "6",
    day = "23",
    language = "Undefined",
    type = "Other",

    }

    Nanomechanical optical devices fabricated with aligned wafer bonding. / Gui, C.; Veldhuis, G.J.; Koster, T.M.; Lambeck, Paul; Berenschot, Johan W.; Gardeniers, Johannes G.E.; Elwenspoek, Michael Curt.

    Enschede. 1998, .

    Research output: Other contributionOther research output

    TY - GEN

    T1 - Nanomechanical optical devices fabricated with aligned wafer bonding

    AU - Gui, C.

    AU - Veldhuis, G.J.

    AU - Koster, T.M.

    AU - Lambeck, Paul

    AU - Berenschot, Johan W.

    AU - Gardeniers, Johannes G.E.

    AU - Elwenspoek, Michael Curt

    PY - 1998/6/23

    Y1 - 1998/6/23

    KW - METIS-114616

    M3 - Other contribution

    CY - Enschede

    ER -