Nanomechanical optical devices fabricated with aligned wafer bonding

C. Gui, G.J. Veldhuis, T.M. Koster, Paul Lambeck, Johan W. Berenschot, Johannes G.E. Gardeniers, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationEnschede
    Publication statusPublished - 23 Jun 1998

    Keywords

    • METIS-114616

    Cite this

    Gui, C., Veldhuis, G. J., Koster, T. M., Lambeck, P., Berenschot, J. W., Gardeniers, J. G. E., & Elwenspoek, M. C. (1998, Jun 23). Nanomechanical optical devices fabricated with aligned wafer bonding. Enschede.