Nanomechanical optical devices fabricated with aligned wafer bonding

C. Gui, G.J. Veldhuis, T.M. Koster, Paul Lambeck, Johan W. Berenschot, Johannes G.E. Gardeniers, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

6 Citations (Scopus)
234 Downloads (Pure)

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