Nanometer interface and materials control for multilayer EUV-optical applications

Research output: Contribution to journalArticleAcademicpeer-review

91 Citations (Scopus)
Original languageEnglish
Pages (from-to)255-294
Number of pages39
JournalProgress in surface science
Volume86
Issue number11-12
DOIs
Publication statusPublished - 2011

Keywords

  • METIS-283201

Cite this

@article{64216f5da2f34c9d8154c4bf4f5a12fe,
title = "Nanometer interface and materials control for multilayer EUV-optical applications",
keywords = "METIS-283201",
author = "Eric Louis and Andrey Yakshin and Frederik Bijkerk and T. Tsarfati",
year = "2011",
doi = "10.1016/j.progsurf.2011.08.001",
language = "English",
volume = "86",
pages = "255--294",
journal = "Progress in surface science",
issn = "0079-6816",
publisher = "Elsevier",
number = "11-12",

}

Nanometer interface and materials control for multilayer EUV-optical applications. / Louis, Eric; Yakshin, Andrey; Bijkerk, Frederik; Tsarfati, T.

In: Progress in surface science, Vol. 86, No. 11-12, 2011, p. 255-294.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Nanometer interface and materials control for multilayer EUV-optical applications

AU - Louis, Eric

AU - Yakshin, Andrey

AU - Bijkerk, Frederik

AU - Tsarfati, T.

PY - 2011

Y1 - 2011

KW - METIS-283201

U2 - 10.1016/j.progsurf.2011.08.001

DO - 10.1016/j.progsurf.2011.08.001

M3 - Article

VL - 86

SP - 255

EP - 294

JO - Progress in surface science

JF - Progress in surface science

SN - 0079-6816

IS - 11-12

ER -