| Original language | English |
|---|---|
| Pages (from-to) | 255-294 |
| Number of pages | 39 |
| Journal | Progress in surface science |
| Volume | 86 |
| Issue number | 11-12 |
| DOIs | |
| Publication status | Published - 2011 |
Keywords
- METIS-283201
Cite this
Louis, E., Yakshin, A., Bijkerk, F., & Tsarfati, T. (2011). Nanometer interface and materials control for multilayer EUV-optical applications. Progress in surface science, 86(11-12), 255-294. https://doi.org/10.1016/j.progsurf.2011.08.001
@article{64216f5da2f34c9d8154c4bf4f5a12fe,
title = "Nanometer interface and materials control for multilayer EUV-optical applications",
keywords = "METIS-283201",
author = "Eric Louis and Andrey Yakshin and Frederik Bijkerk and T. Tsarfati",
year = "2011",
doi = "10.1016/j.progsurf.2011.08.001",
language = "English",
volume = "86",
pages = "255--294",
journal = "Progress in surface science",
issn = "0079-6816",
publisher = "Elsevier",
number = "11-12",
}
Louis, E, Yakshin, A, Bijkerk, F & Tsarfati, T 2011, 'Nanometer interface and materials control for multilayer EUV-optical applications' Progress in surface science, vol. 86, no. 11-12, pp. 255-294. https://doi.org/10.1016/j.progsurf.2011.08.001
Nanometer interface and materials control for multilayer EUV-optical applications. / Louis, Eric; Yakshin, Andrey; Bijkerk, Frederik; Tsarfati, T.
In: Progress in surface science, Vol. 86, No. 11-12, 2011, p. 255-294.Research output: Contribution to journal › Article › Academic › peer-review
TY - JOUR
T1 - Nanometer interface and materials control for multilayer EUV-optical applications
AU - Louis, Eric
AU - Yakshin, Andrey
AU - Bijkerk, Frederik
AU - Tsarfati, T.
PY - 2011
Y1 - 2011
KW - METIS-283201
U2 - 10.1016/j.progsurf.2011.08.001
DO - 10.1016/j.progsurf.2011.08.001
M3 - Article
VL - 86
SP - 255
EP - 294
JO - Progress in surface science
JF - Progress in surface science
SN - 0079-6816
IS - 11-12
ER -