Nanometer interface and materials control for multilayer EUV-optical applications

Eric Louis, Andrey Yakshin, Frederik Bijkerk, T. Tsarfati

Research output: Contribution to journalArticleAcademicpeer-review

102 Citations (Scopus)
Original languageEnglish
Pages (from-to)255-294
Number of pages39
JournalProgress in surface science
Volume86
Issue number11-12
DOIs
Publication statusPublished - 2011

Keywords

  • METIS-283201

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