Nanometer interface and materials control for multilayer EUV-optical applications

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105 Citations (Scopus)

Keywords

@article{64216f5da2f34c9d8154c4bf4f5a12fe,

title = "Nanometer interface and materials control for multilayer EUV-optical applications",

keywords = "METIS-283201",

author = "Eric Louis and Andrey Yakshin and Frederik Bijkerk and T. Tsarfati",

year = "2011",

doi = "10.1016/j.progsurf.2011.08.001",

language = "English",

volume = "86",

pages = "255--294",

journal = "Progress in surface science",

issn = "0079-6816",

publisher = "Elsevier",

number = "11-12",

}

TY - JOUR

T1 - Nanometer interface and materials control for multilayer EUV-optical applications

AU - Louis, Eric

AU - Yakshin, Andrey

AU - Bijkerk, Frederik

AU - Tsarfati, T.

PY - 2011

Y1 - 2011

KW - METIS-283201

U2 - 10.1016/j.progsurf.2011.08.001

DO - 10.1016/j.progsurf.2011.08.001

M3 - Article

VL - 86

SP - 255

EP - 294

JO - Progress in surface science

JF - Progress in surface science

SN - 0079-6816

IS - 11-12

ER -