Nanometer resolution TEM sample manipulator for rotational and translational positioning

B.R. de Jong, Dannis Michel Brouwer, Henricus V. Jansen, Meint J. de Boer, Gijsbertus J.M. Krijnen

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Abstract

The design and fabrication process for a high performance manipulation stage for nanometer resolution TEM sample positioning over a 20 μm range is presented. A two level, planar stage is moved in three translational and three rotational directions by just two types of actuators; three horizontal and three vertical combdrives. The vertical combdrives are suspended by optimally designed torsion-beams, improving lateral stiffness by at least a factor of 50 compared to rectangular beams, hence minimizing the chance of electrostatic side pull-in.
Original languageUndefined
Title of host publicationProceedings of EuroSensors XIX 2005
Place of PublicationAmsterdam
PublisherElsevier
Pages1-4
Number of pages4
ISBN (Print)84-475-2984-3
Publication statusPublished - Sep 2005
Event19th European Conference on Solid-State Transducers, EuroSensors XIX - Barcelona, Spain
Duration: 11 Sep 200514 Sep 2005
Conference number: 19

Publication series

Name
VolumeTP 43

Conference

Conference19th European Conference on Solid-State Transducers, EuroSensors XIX
Abbreviated titleEuroSensors
CountrySpain
CityBarcelona
Period11/09/0514/09/05

Keywords

  • METIS-228548
  • IR-76055
  • vertical combdrive
  • EWI-19628
  • nano manipulation
  • nano positioning
  • Precision MEMS

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