Nanometer resolution TEM sample manipulator for rotational and translational positioning

B.R. de Jong; D.M. Brouwer; H.V. Jansen; M.J. de Boer; G.J.M. Krijnen

Nanometer resolution TEM sample manipulator for rotational and translational positioning

B.R. de Jong
, D.M. Brouwer
, H.V. Jansen
, M.J. de Boer
, G.J.M. Krijnen

Faculty of Engineering Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

95 Downloads (Pure)

Abstract

The design and fabrication process for a high performance manipulation stage for nanometer resolution TEM sample positioning over a 20 μm range is presented. A two level, planar stage is moved in three translational and three rotational directions by just two types of actuators; three horizontal and three vertical combdrives. The vertical combdrives are suspended by optimally designed torsion-beams, improving lateral stiffness by at least a factor of 50 compared to rectangular beams, hence minimizing the chance of electrostatic side pull-in.

Original language	English
Title of host publication	Proceedings of EuroSensors XIX 2005
Place of Publication	Amsterdam
Publisher	Elsevier
Pages	1-4
Number of pages	4
ISBN (Print)	84-475-2984-3
Publication status	Published - Sept 2005
Event	19th European Conference on Solid-State Transducers, EuroSensors XIX - Barcelona, Spain Duration: 11 Sept 2005 → 14 Sept 2005 Conference number: 19

Conference

Conference	19th European Conference on Solid-State Transducers, EuroSensors XIX
Abbreviated title	EuroSensors
Country/Territory	Spain
City	Barcelona
Period	11/09/05 → 14/09/05

Keywords

Vertical combdrive
Nano manipulation
Nnano positioning
Precision MEMS

Access to Document

DeJong2006nanometerFinal published version, 321 KB

Cite this

@inproceedings{5720b903407a4467b10b6b2757cdbc4c,

title = "Nanometer resolution TEM sample manipulator for rotational and translational positioning",

abstract = "The design and fabrication process for a high performance manipulation stage for nanometer resolution TEM sample positioning over a 20 μm range is presented. A two level, planar stage is moved in three translational and three rotational directions by just two types of actuators; three horizontal and three vertical combdrives. The vertical combdrives are suspended by optimally designed torsion-beams, improving lateral stiffness by at least a factor of 50 compared to rectangular beams, hence minimizing the chance of electrostatic side pull-in.",

keywords = "Vertical combdrive, Nano manipulation, Nnano positioning, Precision MEMS",

author = "\{de Jong\}, B.R. and D.M. Brouwer and H.V. Jansen and \{de Boer\}, M.J. and G.J.M. Krijnen",

note = "This work has been made possible by the financial support of the Dutch ministry of economic affairs program IOP Precision Technology.; 19th European Conference on Solid-State Transducers, EuroSensors XIX, EuroSensors ; Conference date: 11-09-2005 Through 14-09-2005",

year = "2005",

month = sep,

language = "English",

isbn = "84-475-2984-3",

pages = "1--4",

booktitle = "Proceedings of EuroSensors XIX 2005",

publisher = "Elsevier",

address = "Spain",

}

TY - GEN

T1 - Nanometer resolution TEM sample manipulator for rotational and translational positioning

AU - de Jong, B.R.

AU - Brouwer, D.M.

AU - Jansen, H.V.

AU - de Boer, M.J.

AU - Krijnen, G.J.M.

N1 - Conference code: 19

PY - 2005/9

Y1 - 2005/9

N2 - The design and fabrication process for a high performance manipulation stage for nanometer resolution TEM sample positioning over a 20 μm range is presented. A two level, planar stage is moved in three translational and three rotational directions by just two types of actuators; three horizontal and three vertical combdrives. The vertical combdrives are suspended by optimally designed torsion-beams, improving lateral stiffness by at least a factor of 50 compared to rectangular beams, hence minimizing the chance of electrostatic side pull-in.

AB - The design and fabrication process for a high performance manipulation stage for nanometer resolution TEM sample positioning over a 20 μm range is presented. A two level, planar stage is moved in three translational and three rotational directions by just two types of actuators; three horizontal and three vertical combdrives. The vertical combdrives are suspended by optimally designed torsion-beams, improving lateral stiffness by at least a factor of 50 compared to rectangular beams, hence minimizing the chance of electrostatic side pull-in.

KW - Vertical combdrive

KW - Nano manipulation

KW - Nnano positioning

KW - Precision MEMS

M3 - Conference contribution

SN - 84-475-2984-3

SP - 1

EP - 4

BT - Proceedings of EuroSensors XIX 2005

PB - Elsevier

CY - Amsterdam

T2 - 19th European Conference on Solid-State Transducers, EuroSensors XIX

Y2 - 11 September 2005 through 14 September 2005

ER -

Nanometer resolution TEM sample manipulator for rotational and translational positioning

Abstract

Conference

Keywords

Access to Document

Fingerprint

Cite this