Nanometerlithography on Si and a-Si:H with low energy electrons

N. Kramer, J. Jorritsma, H. Birk, C. Schoeneberger

Research output: Chapter in Book/Report/Conference proceedingChapterAcademic

58 Citations (Scopus)
Original languageUndefined
Title of host publicationproceedings, MNCE '94
Place of PublicationDenver, Colorado, USA
Pages223-223
Number of pages1
Publication statusPublished - 1994

Keywords

  • METIS-129848

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