| Original language | Undefined |
|---|---|
| Title of host publication | proceedings, MNCE '94 |
| Place of Publication | Denver, Colorado, USA |
| Pages | 223-223 |
| Number of pages | 1 |
| Publication status | Published - 1994 |
Keywords
- METIS-129848
Nanometerlithography on Si and a-Si:H with low energy electrons
N. Kramer, J. Jorritsma, H. Birk, C. Schoeneberger
Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic
58
Citations
(Scopus)