Nanopores Created using an Internal Shadowmask Process

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Abstract

AbstractWe report on the manufacturing of nanopore through-holes by heating gold nanoparticles on a silicon oxide (SiO2) sheet, suspended in a silicon-rich nitride membrane (SiRN).Membrane patterning is performed using self-alignment by an internal shadow mask based process. A benefit of this approach is the ease at which downscaling of the lithographic features can be achieved. With a single alignment, a shadow mask is etched and metal is deposited. The nanopore through hole is then created after heating. In this paper this scalable technique is applied to create non-buckled membranes by combining the compressive and tensile stress components in a SiO2/SiRN bilayer. Theory on the bilayer stresses is given in order to characterize the buckling. The nanopore through holes are characterized using ionic currentmeasurements and electron microscopy techniques.
Original languageEnglish
Title of host publicationIEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2016)
PublisherIEEE
ISBN (Electronic)978-1-5090-1947-2
ISBN (Print)978-1-5090-1948-9
DOIs
Publication statusPublished - 17 Apr 2016
Event11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016 - Hotel Matsushima Taikanso, Matsushima Bay and Sendai MEMS City, Japan
Duration: 17 Apr 201620 Apr 2016
Conference number: 11
https://ieee-nems.org/2016/

Conference

Conference11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
Abbreviated titleNEMS
CountryJapan
CityMatsushima Bay and Sendai MEMS City
Period17/04/1620/04/16
Internet address

Fingerprint

membranes
silicon nitrides
masks
self alignment
heating
buckling
tensile stress
silicon oxides
electron microscopy
manufacturing
alignment
gold
microscopy
nanoparticles
metals

Keywords

  • METIS-320317

Cite this

@inproceedings{bf5610388bf24cfd8d5e40b73214e047,
title = "Nanopores Created using an Internal Shadowmask Process",
abstract = "AbstractWe report on the manufacturing of nanopore through-holes by heating gold nanoparticles on a silicon oxide (SiO2) sheet, suspended in a silicon-rich nitride membrane (SiRN).Membrane patterning is performed using self-alignment by an internal shadow mask based process. A benefit of this approach is the ease at which downscaling of the lithographic features can be achieved. With a single alignment, a shadow mask is etched and metal is deposited. The nanopore through hole is then created after heating. In this paper this scalable technique is applied to create non-buckled membranes by combining the compressive and tensile stress components in a SiO2/SiRN bilayer. Theory on the bilayer stresses is given in order to characterize the buckling. The nanopore through holes are characterized using ionic currentmeasurements and electron microscopy techniques.",
keywords = "METIS-320317",
author = "{de Vreede}, Lennart and Berenschot, {Johan W.} and Tas, {Niels Roelof} and {van den Beld}, {Wesley Theodorus Eduardus} and Loessberg-Zahl, {Joshua Taylor} and {van den Berg}, Albert and Eijkel, {Jan C.T.}",
year = "2016",
month = "4",
day = "17",
doi = "10.1109/NEMS.2016.7758204",
language = "English",
isbn = "978-1-5090-1948-9",
booktitle = "IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2016)",
publisher = "IEEE",
address = "United States",

}

de Vreede, L, Berenschot, JW, Tas, NR, van den Beld, WTE, Loessberg-Zahl, JT, van den Berg, A & Eijkel, JCT 2016, Nanopores Created using an Internal Shadowmask Process. in IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2016). IEEE, 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Matsushima Bay and Sendai MEMS City, Japan, 17/04/16. https://doi.org/10.1109/NEMS.2016.7758204

Nanopores Created using an Internal Shadowmask Process. / de Vreede, Lennart; Berenschot, Johan W.; Tas, Niels Roelof; van den Beld, Wesley Theodorus Eduardus; Loessberg-Zahl, Joshua Taylor; van den Berg, Albert; Eijkel, Jan C.T.

IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2016). IEEE, 2016.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Nanopores Created using an Internal Shadowmask Process

AU - de Vreede, Lennart

AU - Berenschot, Johan W.

AU - Tas, Niels Roelof

AU - van den Beld, Wesley Theodorus Eduardus

AU - Loessberg-Zahl, Joshua Taylor

AU - van den Berg, Albert

AU - Eijkel, Jan C.T.

PY - 2016/4/17

Y1 - 2016/4/17

N2 - AbstractWe report on the manufacturing of nanopore through-holes by heating gold nanoparticles on a silicon oxide (SiO2) sheet, suspended in a silicon-rich nitride membrane (SiRN).Membrane patterning is performed using self-alignment by an internal shadow mask based process. A benefit of this approach is the ease at which downscaling of the lithographic features can be achieved. With a single alignment, a shadow mask is etched and metal is deposited. The nanopore through hole is then created after heating. In this paper this scalable technique is applied to create non-buckled membranes by combining the compressive and tensile stress components in a SiO2/SiRN bilayer. Theory on the bilayer stresses is given in order to characterize the buckling. The nanopore through holes are characterized using ionic currentmeasurements and electron microscopy techniques.

AB - AbstractWe report on the manufacturing of nanopore through-holes by heating gold nanoparticles on a silicon oxide (SiO2) sheet, suspended in a silicon-rich nitride membrane (SiRN).Membrane patterning is performed using self-alignment by an internal shadow mask based process. A benefit of this approach is the ease at which downscaling of the lithographic features can be achieved. With a single alignment, a shadow mask is etched and metal is deposited. The nanopore through hole is then created after heating. In this paper this scalable technique is applied to create non-buckled membranes by combining the compressive and tensile stress components in a SiO2/SiRN bilayer. Theory on the bilayer stresses is given in order to characterize the buckling. The nanopore through holes are characterized using ionic currentmeasurements and electron microscopy techniques.

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BT - IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2016)

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de Vreede L, Berenschot JW, Tas NR, van den Beld WTE, Loessberg-Zahl JT, van den Berg A et al. Nanopores Created using an Internal Shadowmask Process. In IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2016). IEEE. 2016 https://doi.org/10.1109/NEMS.2016.7758204