Nanopores Created using an Internal Shadowmask Process

Lennart de Vreede; Johan W. Berenschot; Niels Roelof Tas; Wesley Theodorus Eduardus van den Beld; Joshua Taylor Loessberg-Zahl; Albert van den Berg; Jan C.T. Eijkel

doi:10.1109/NEMS.2016.7758204

Nanopores Created using an Internal Shadowmask Process

Lennart de Vreede, Johan W. Berenschot, Niels Roelof Tas, Wesley Theodorus Eduardus van den Beld, Joshua Taylor Loessberg-Zahl, Albert van den Berg, Jan C.T. Eijkel

Mesoscale Chemical Systems

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

AbstractWe report on the manufacturing of nanopore through-holes by heating gold nanoparticles on a silicon oxide (SiO2) sheet, suspended in a silicon-rich nitride membrane (SiRN).Membrane patterning is performed using self-alignment by an internal shadow mask based process. A benefit of this approach is the ease at which downscaling of the lithographic features can be achieved. With a single alignment, a shadow mask is etched and metal is deposited. The nanopore through hole is then created after heating. In this paper this scalable technique is applied to create non-buckled membranes by combining the compressive and tensile stress components in a SiO2/SiRN bilayer. Theory on the bilayer stresses is given in order to characterize the buckling. The nanopore through holes are characterized using ionic currentmeasurements and electron microscopy techniques.

Original language	English
Title of host publication	IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2016)
Publisher	IEEE
ISBN (Electronic)	978-1-5090-1947-2
ISBN (Print)	978-1-5090-1948-9
DOIs	https://doi.org/10.1109/NEMS.2016.7758204
Publication status	Published - 17 Apr 2016
Event	11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016 - Hotel Matsushima Taikanso, Matsushima Bay and Sendai MEMS City, Japan Duration: 17 Apr 2016 → 20 Apr 2016 Conference number: 11 https://ieee-nems.org/2016/

Conference

Conference	11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
Abbreviated title	NEMS
Country/Territory	Japan
City	Matsushima Bay and Sendai MEMS City
Period	17/04/16 → 20/04/16
Internet address	https://ieee-nems.org/2016/

Keywords

METIS-320317

Access to Document

10.1109/NEMS.2016.7758204

Cite this

@inproceedings{bf5610388bf24cfd8d5e40b73214e047,

title = "Nanopores Created using an Internal Shadowmask Process",

abstract = "AbstractWe report on the manufacturing of nanopore through-holes by heating gold nanoparticles on a silicon oxide (SiO2) sheet, suspended in a silicon-rich nitride membrane (SiRN).Membrane patterning is performed using self-alignment by an internal shadow mask based process. A benefit of this approach is the ease at which downscaling of the lithographic features can be achieved. With a single alignment, a shadow mask is etched and metal is deposited. The nanopore through hole is then created after heating. In this paper this scalable technique is applied to create non-buckled membranes by combining the compressive and tensile stress components in a SiO2/SiRN bilayer. Theory on the bilayer stresses is given in order to characterize the buckling. The nanopore through holes are characterized using ionic currentmeasurements and electron microscopy techniques.",

keywords = "METIS-320317",

author = "{de Vreede}, Lennart and Berenschot, {Johan W.} and Tas, {Niels Roelof} and {van den Beld}, {Wesley Theodorus Eduardus} and Loessberg-Zahl, {Joshua Taylor} and {van den Berg}, Albert and Eijkel, {Jan C.T.}",

year = "2016",

month = apr,

day = "17",

doi = "10.1109/NEMS.2016.7758204",

language = "English",

isbn = "978-1-5090-1948-9",

booktitle = "IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2016)",

publisher = "IEEE",

address = "United States",

note = "11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, NEMS ; Conference date: 17-04-2016 Through 20-04-2016",

url = "https://ieee-nems.org/2016/",

}

de Vreede, L, Berenschot, JW , Tas, NR , van den Beld, WTE , Loessberg-Zahl, JT , van den Berg, A & Eijkel, JCT 2016, Nanopores Created using an Internal Shadowmask Process. in IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2016). IEEE, 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Matsushima Bay and Sendai MEMS City, Japan, 17/04/16. https://doi.org/10.1109/NEMS.2016.7758204

TY - GEN

T1 - Nanopores Created using an Internal Shadowmask Process

AU - de Vreede, Lennart

AU - Berenschot, Johan W.

AU - Tas, Niels Roelof

AU - van den Beld, Wesley Theodorus Eduardus

AU - Loessberg-Zahl, Joshua Taylor

AU - van den Berg, Albert

AU - Eijkel, Jan C.T.

N1 - Conference code: 11

PY - 2016/4/17

Y1 - 2016/4/17

N2 - AbstractWe report on the manufacturing of nanopore through-holes by heating gold nanoparticles on a silicon oxide (SiO2) sheet, suspended in a silicon-rich nitride membrane (SiRN).Membrane patterning is performed using self-alignment by an internal shadow mask based process. A benefit of this approach is the ease at which downscaling of the lithographic features can be achieved. With a single alignment, a shadow mask is etched and metal is deposited. The nanopore through hole is then created after heating. In this paper this scalable technique is applied to create non-buckled membranes by combining the compressive and tensile stress components in a SiO2/SiRN bilayer. Theory on the bilayer stresses is given in order to characterize the buckling. The nanopore through holes are characterized using ionic currentmeasurements and electron microscopy techniques.

AB - AbstractWe report on the manufacturing of nanopore through-holes by heating gold nanoparticles on a silicon oxide (SiO2) sheet, suspended in a silicon-rich nitride membrane (SiRN).Membrane patterning is performed using self-alignment by an internal shadow mask based process. A benefit of this approach is the ease at which downscaling of the lithographic features can be achieved. With a single alignment, a shadow mask is etched and metal is deposited. The nanopore through hole is then created after heating. In this paper this scalable technique is applied to create non-buckled membranes by combining the compressive and tensile stress components in a SiO2/SiRN bilayer. Theory on the bilayer stresses is given in order to characterize the buckling. The nanopore through holes are characterized using ionic currentmeasurements and electron microscopy techniques.

KW - METIS-320317

U2 - 10.1109/NEMS.2016.7758204

DO - 10.1109/NEMS.2016.7758204

M3 - Conference contribution

SN - 978-1-5090-1948-9

BT - IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2016)

PB - IEEE

T2 - 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016

Y2 - 17 April 2016 through 20 April 2016

ER -

Nanopores Created using an Internal Shadowmask Process

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