Nanoscale patterning by UV nanoimprint lithography using an organometallic resist

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)
Original languageUndefined
Pages (from-to)2645-2650
Number of pages6
JournalACS applied materials & interfaces
Volume1
Publication statusPublished - 2009

Keywords

  • METIS-262729

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