Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics

Mohammadreza Nematollahi*, Philip Lucke, Muharrem Bayraktar, Andrey Yakshin, A.J.H.M. Rijnders, F. Bijkerk

*Corresponding author for this work

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Extreme ultraviolet and soft x-ray wavelengths have ever-increasing applications in photolithography, imaging, and spectroscopy. Adaptive schemes for wavefront correction at such a short wavelength range have recently gained much attention. In this Letter we report, to the best of our knowledge, the first demonstration of a functional actuator based on piezoelectric thin films. We introduce a new approach that allows producing a gradually varying surface deformation. White light interferometery is used to show the level of control in generating arbitrary surface profiles at the nanoscale.
Original languageEnglish
Pages (from-to)5104-5107
Number of pages4
JournalOptics letters
Issue number20
Publication statusPublished - 15 Oct 2019


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