Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics

Research output: Contribution to journalArticleAcademicpeer-review

2 Downloads (Pure)

Abstract

Extreme ultraviolet and soft x-ray wavelengths have ever-increasing applications in photolithography, imaging, and spectroscopy. Adaptive schemes for wavefront correction at such a short wavelength range have recently gained much attention. In this Letter we report, to the best of our knowledge, the first demonstration of a functional actuator based on piezoelectric thin films. We introduce a new approach that allows producing a gradually varying surface deformation. White light interferometery is used to show the level of control in generating arbitrary surface profiles at the nanoscale.
Original languageEnglish
Pages (from-to)5104-5107
Number of pages4
JournalOptics letters
Volume44
Issue number20
DOIs
Publication statusPublished - 15 Oct 2019

Fingerprint

x ray optics
modulation
photolithography
wavelengths
actuators
thin films
profiles
spectroscopy
x rays

Cite this

@article{03e923f0fa2c4411a15d85eacec81993,
title = "Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics",
abstract = "Extreme ultraviolet and soft x-ray wavelengths have ever-increasing applications in photolithography, imaging, and spectroscopy. Adaptive schemes for wavefront correction at such a short wavelength range have recently gained much attention. In this Letter we report, to the best of our knowledge, the first demonstration of a functional actuator based on piezoelectric thin films. We introduce a new approach that allows producing a gradually varying surface deformation. White light interferometery is used to show the level of control in generating arbitrary surface profiles at the nanoscale.",
author = "Mohammadreza Nematollahi and Philip Lucke and Muharrem Bayraktar and Andrey Yakshin and A.J.H.M. Rijnders and F. Bijkerk",
year = "2019",
month = "10",
day = "15",
doi = "10.1364/OL.44.005104",
language = "English",
volume = "44",
pages = "5104--5107",
journal = "Optics letters",
issn = "0146-9592",
publisher = "The Optical Society",
number = "20",

}

TY - JOUR

T1 - Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics

AU - Nematollahi, Mohammadreza

AU - Lucke, Philip

AU - Bayraktar, Muharrem

AU - Yakshin, Andrey

AU - Rijnders, A.J.H.M.

AU - Bijkerk, F.

PY - 2019/10/15

Y1 - 2019/10/15

N2 - Extreme ultraviolet and soft x-ray wavelengths have ever-increasing applications in photolithography, imaging, and spectroscopy. Adaptive schemes for wavefront correction at such a short wavelength range have recently gained much attention. In this Letter we report, to the best of our knowledge, the first demonstration of a functional actuator based on piezoelectric thin films. We introduce a new approach that allows producing a gradually varying surface deformation. White light interferometery is used to show the level of control in generating arbitrary surface profiles at the nanoscale.

AB - Extreme ultraviolet and soft x-ray wavelengths have ever-increasing applications in photolithography, imaging, and spectroscopy. Adaptive schemes for wavefront correction at such a short wavelength range have recently gained much attention. In this Letter we report, to the best of our knowledge, the first demonstration of a functional actuator based on piezoelectric thin films. We introduce a new approach that allows producing a gradually varying surface deformation. White light interferometery is used to show the level of control in generating arbitrary surface profiles at the nanoscale.

UR - http://www.scopus.com/inward/record.url?scp=85073174504&partnerID=8YFLogxK

U2 - 10.1364/OL.44.005104

DO - 10.1364/OL.44.005104

M3 - Article

VL - 44

SP - 5104

EP - 5107

JO - Optics letters

JF - Optics letters

SN - 0146-9592

IS - 20

ER -