Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics

Mohammadreza  Nematollahi; Philip  Lucke; Muharrem  Bayraktar; Andrey  Yakshin; A.J.H.M. Rijnders; F. Bijkerk

doi:10.1364/OL.44.005104

Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics

Mohammadreza Nematollahi^*, Philip Lucke, Muharrem Bayraktar, Andrey Yakshin, A.J.H.M. Rijnders, F. Bijkerk

^*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

Extreme ultraviolet and soft x-ray wavelengths have ever-increasing applications in photolithography, imaging, and spectroscopy. Adaptive schemes for wavefront correction at such a short wavelength range have recently gained much attention. In this Letter we report, to the best of our knowledge, the first demonstration of a functional actuator based on piezoelectric thin films. We introduce a new approach that allows producing a gradually varying surface deformation. White light interferometery is used to show the level of control in generating arbitrary surface profiles at the nanoscale.

Original language	English
Pages (from-to)	5104-5107
Number of pages	4
Journal	Optics letters
Volume	44
Issue number	20
DOIs	https://doi.org/10.1364/OL.44.005104
Publication status	Published - 15 Oct 2019

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AU - Rijnders, A.J.H.M.

AU - Bijkerk, F.

PY - 2019/10/15

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AB - Extreme ultraviolet and soft x-ray wavelengths have ever-increasing applications in photolithography, imaging, and spectroscopy. Adaptive schemes for wavefront correction at such a short wavelength range have recently gained much attention. In this Letter we report, to the best of our knowledge, the first demonstration of a functional actuator based on piezoelectric thin films. We introduce a new approach that allows producing a gradually varying surface deformation. White light interferometery is used to show the level of control in generating arbitrary surface profiles at the nanoscale.

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Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics

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