Nanoscale piezoelectric surface modulation for adaptive extreme ultraviolet and soft x-ray optics

Mohammadreza Nematollahi*, Philip Lucke, Muharrem Bayraktar, Andrey Yakshin, A.J.H.M. Rijnders, F. Bijkerk

*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

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