Nanostructured dense ZrO2 thin films from nanoparticles obtained by emulsion precipitation

F.C.M. Woudenberg, W.F.C. Sager, Johan E. ten Elshof, H. Verweij

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Nonagglomerated spherical ZrO2 particles of 5–8 nm size were made by emulsion precipitation. Their crystallization and film-forming characteristics were investigated and compared with nanosized ZrO2 powders obtained by sol–gel precipitation. High-temperature X-ray diffraction indicated that the emulsion-derived particles are amorphous and crystallize at 500°C into tetragonal zirconia, which is stable up to 1000°C. Crystallite growth from 5–20 nm occurred between 500°–900°C. Films of 6–75 nm thickness were made by spreading, spin coating, and controlled deposition techniques and annealed at 500°–600°C. The occurrence of t-ZrO2 in the emulsion-precipitated powder is explained by the low degree of agglomeration and the corresponding low coarsening on heating to 500°–800°C, whereas the agglomerated state of the sol–gel precipitate powder favors the occurrence of the monoclinic form of zirconia under similar conditions.
Original languageUndefined
Pages (from-to)1430-1435
Number of pages6
JournalJournal of the American Ceramic Society
Issue number8
Publication statusPublished - 2004


  • METIS-219093
  • IR-58435

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