Nanotesla torque magnetometry using a microcantilever

J.W. van Honschoten, W.W. Koelmans, S.M. Konings, Leon Abelmann, Michael Curt Elwenspoek

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    Abstract

    We present a novel ultrasensitive magnetometry technique using a micromachined magnetic cantilever that is brought in resonance. The induced magnetic moment generates a torque on the cantilever, thereby effectively stiffening the cantilever spring constant and changing its resonance frequency. Experiments are in good correspondence with the presented analytical model for this frequency shift, predicting the detection of nanotesla magnetic fields.
    Original languageUndefined
    Title of host publicationEurosensors XXII
    Place of PublicationDresden
    PublisherEurosensors Committee
    Pages597-600
    Number of pages4
    ISBN (Print)978-3-00-025217-4
    Publication statusPublished - 2008
    Event22nd International Conference on Solid-State Sensors, Actuators, Microsystems and Nanosystems 2008 - Dresden, Germany
    Duration: 7 Sep 200810 Sep 2008
    Conference number: 22

    Publication series

    Name
    PublisherEurosensors Committee

    Conference

    Conference22nd International Conference on Solid-State Sensors, Actuators, Microsystems and Nanosystems 2008
    Abbreviated titleEurosensors 2008
    CountryGermany
    CityDresden
    Period7/09/0810/09/08

    Keywords

    • EWI-13828
    • IR-65043
    • TST-SMI: Formerly in EWI-SMI
    • TST-uSPAM: micro Scanning Probe Array Memory
    • METIS-255871

    Cite this

    van Honschoten, J. W., Koelmans, W. W., Konings, S. M., Abelmann, L., & Elwenspoek, M. C. (2008). Nanotesla torque magnetometry using a microcantilever. In Eurosensors XXII (pp. 597-600). Dresden: Eurosensors Committee.