Narrow-band Borrmann multilayer filters for monitoring of EUV sources

J.L.P. Barreaux, Hubertus M.J. Bastiaens, I.V. Kozhevnikov, Frederik Bijkerk, Klaus J. Boller

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Pages-
Publication statusPublished - 27 Oct 2014
EventNanoCity 2014 - Utrecht, the Netherlands
Duration: 27 Oct 201428 Oct 2014

Conference

ConferenceNanoCity 2014
CityUtrecht, the Netherlands
Period27/10/1428/10/14

Keywords

  • METIS-308618

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