Narrow-band Borrmann multilayer filters for monitoring of EUV sources

J.L.P. Barreaux, Hubertus M.J. Bastiaens, I.V. Kozhevnikov, Frederik Bijkerk, Klaus J. Boller

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Pages-
Publication statusPublished - 27 Oct 2014

Keywords

  • METIS-308618

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