Narrow-band multilayer Borrmann filters for monitoring of EUV sources

J.L.P. Barreaux, Hubertus M.J. Bastiaens, I.V. Kozhevnikov, Frederik Bijkerk, Klaus J. Boller

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Pages-
Publication statusPublished - 20 Jan 2015
EventPhysics@FOM Veldhoven 2015 - NH Koningshof Veldhoven, Veldhoven, Netherlands
Duration: 20 Jan 201521 Jan 2015

Conference

ConferencePhysics@FOM Veldhoven 2015
Country/TerritoryNetherlands
CityVeldhoven
Period20/01/1521/01/15

Keywords

  • METIS-312118

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