Narrow-range angle sensor based on wiggles in angular dependence of pseudo-Hall effect

P.L.K. Phan le kim; Nguyen Phu Thuy; P. Le Minh; Dinh Hung Manh

doi:10.1016/S0924-4247(01)00844-5

Narrow-range angle sensor based on wiggles in angular dependence of pseudo-Hall effect

P.L.K. Phan le kim, Nguyen Phu Thuy, P. Le Minh, Dinh Hung Manh

Research output: Contribution to journal › Article › Academic › peer-review

Abstract

In this paper, for the first time a new type of narrow-range angle sensor based on pseudo-Hall effect is introduced and studied. This sensor is designed to be sensitive to very small changes in angle with detected range is scaled down to about 0.5°. An intensive investigation has been carried out to study the behaviors of the sensor and optimize its performance. These behaviors are discussed and explained using an analytical simulation. Several designs for making the sensor on a Si wafer are suggested. Moreover, some applications of the sensor are proposed and a demo device based on the sensor is presented.

Original language	Undefined
Pages (from-to)	308-317
Number of pages	10
Journal	Sensors and actuators. A: Physical
Volume	97-98
DOIs	https://doi.org/10.1016/S0924-4247(01)00844-5
Publication status	Published - 2002

Keywords

SMI-TST: From 2006 in EWI-TST
EWI-5484
IR-62976
METIS-208309
SMI-REC: RECORDING

Access to Document

10.1016/S0924-4247(01)00844-5

http://eprints.eemcs.utwente.nl/secure2/5484/01/KIM2002B.PDF

Cite this

Phan le kim, P. L. K., Thuy, N. P., Le Minh, P., & Manh, D. H. (2002). Narrow-range angle sensor based on wiggles in angular dependence of pseudo-Hall effect. Sensors and actuators. A: Physical, 97-98, 308-317. https://doi.org/10.1016/S0924-4247(01)00844-5

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AU - Thuy, Nguyen Phu

AU - Le Minh, P.

AU - Manh, Dinh Hung

N1 - Imported from SMI Reference manager

PY - 2002

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KW - SMI-TST: From 2006 in EWI-TST

KW - EWI-5484

KW - IR-62976

KW - METIS-208309

KW - SMI-REC: RECORDING

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JO - Sensors and actuators. A: Physical

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