Narrow-range angle sensor based on wiggles in angular dependence of pseudo-Hall effect

P.L.K. Phan le kim, Nguyen Phu Thuy, P. Le Minh, Dinh Hung Manh

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    In this paper, for the first time a new type of narrow-range angle sensor based on pseudo-Hall effect is introduced and studied. This sensor is designed to be sensitive to very small changes in angle with detected range is scaled down to about 0.5°. An intensive investigation has been carried out to study the behaviors of the sensor and optimize its performance. These behaviors are discussed and explained using an analytical simulation. Several designs for making the sensor on a Si wafer are suggested. Moreover, some applications of the sensor are proposed and a demo device based on the sensor is presented.
    Original languageUndefined
    Pages (from-to)308-317
    Number of pages10
    JournalSensors and actuators. A: Physical
    Publication statusPublished - 2002


    • SMI-TST: From 2006 in EWI-TST
    • EWI-5484
    • IR-62976
    • METIS-208309

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