Near-field optical microscope using a silicon-nitride probe

N.F. van Hulst, M.H.P. Moers, O.F.J. Noordman, R.G. Tack, F.B. Segerink, B. Bölger

Research output: Contribution to journalArticleAcademicpeer-review

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Abstract

Operation of an alternative near-field optical microscope is presented. The microscope uses a microfabricated silicon- nitride probe with integrated cantilever, as originally developed for force microscopy. The cantilever allows routine close contact near-field imaging o­n arbitrary surfaces without tip destruction. The effect of adhesion forces o­n the coupling to the evanescent wave has been observed. Images with a lateral resolution of about 50 nm are presented and compared with atomic force images. A specific sample area can be selected using an integrated conventional light microscope.
Original languageEnglish
Pages (from-to)461-463
Number of pages4
JournalApplied physics letters
Volume62
Issue number5
DOIs
Publication statusPublished - 1993

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