Near-field optical microscope using a silicon-nitride probe

N.F. van Hulst; M.H.P. Moers; O.F.J. Noordman; R.G. Tack; F.B. Segerink; B. Bölger

doi:10.1063/1.108933

Near-field optical microscope using a silicon-nitride probe

N.F. van Hulst, M.H.P. Moers, O.F.J. Noordman, R.G. Tack, F.B. Segerink, B. Bölger

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Abstract

Operation of an alternative near-field optical microscope is presented. The microscope uses a microfabricated silicon- nitride probe with integrated cantilever, as originally developed for force microscopy. The cantilever allows routine close contact near-field imaging on arbitrary surfaces without tip destruction. The effect of adhesion forces on the coupling to the evanescent wave has been observed. Images with a lateral resolution of about 50 nm are presented and compared with atomic force images. A specific sample area can be selected using an integrated conventional light microscope.

Original language	English
Pages (from-to)	461-463
Number of pages	4
Journal	Applied physics letters
Volume	62
Issue number	5
DOIs	https://doi.org/10.1063/1.108933
Publication status	Published - 1993

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title = "Near-field optical microscope using a silicon-nitride probe",

abstract = "Operation of an alternative near-field optical microscope is presented. The microscope uses a microfabricated silicon- nitride probe with integrated cantilever, as originally developed for force microscopy. The cantilever allows routine close contact near-field imaging on arbitrary surfaces without tip destruction. The effect of adhesion forces on the coupling to the evanescent wave has been observed. Images with a lateral resolution of about 50 nm are presented and compared with atomic force images. A specific sample area can be selected using an integrated conventional light microscope.",

author = "{van Hulst}, N.F. and M.H.P. Moers and O.F.J. Noordman and R.G. Tack and F.B. Segerink and B. B{\"o}lger",

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journal = "Applied physics letters",

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AU - van Hulst, N.F.

AU - Moers, M.H.P.

AU - Noordman, O.F.J.

AU - Tack, R.G.

AU - Segerink, F.B.

AU - Bölger, B.

PY - 1993

Y1 - 1993

N2 - Operation of an alternative near-field optical microscope is presented. The microscope uses a microfabricated silicon- nitride probe with integrated cantilever, as originally developed for force microscopy. The cantilever allows routine close contact near-field imaging on arbitrary surfaces without tip destruction. The effect of adhesion forces on the coupling to the evanescent wave has been observed. Images with a lateral resolution of about 50 nm are presented and compared with atomic force images. A specific sample area can be selected using an integrated conventional light microscope.

AB - Operation of an alternative near-field optical microscope is presented. The microscope uses a microfabricated silicon- nitride probe with integrated cantilever, as originally developed for force microscopy. The cantilever allows routine close contact near-field imaging on arbitrary surfaces without tip destruction. The effect of adhesion forces on the coupling to the evanescent wave has been observed. Images with a lateral resolution of about 50 nm are presented and compared with atomic force images. A specific sample area can be selected using an integrated conventional light microscope.

U2 - 10.1063/1.108933

DO - 10.1063/1.108933

M3 - Article

SN - 0003-6951

VL - 62

SP - 461

EP - 463

JO - Applied physics letters

JF - Applied physics letters

IS - 5

ER -

Near-field optical microscope using a silicon-nitride probe

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