Network functions for representation of crystal growth and etch rates

J. van Suchtelen, E. van Veenendaal, A.J. Nijdam, Johannes G.E. Gardeniers, W.J.P. van Enckevort, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationHolten
    Publication statusPublished - 18 May 1998

    Keywords

    • METIS-114707

    Cite this

    van Suchtelen, J., van Veenendaal, E., Nijdam, A. J., Gardeniers, J. G. E., van Enckevort, W. J. P., & Elwenspoek, M. C. (1998, May 18). Network functions for representation of crystal growth and etch rates. Holten.
    van Suchtelen, J. ; van Veenendaal, E. ; Nijdam, A.J. ; Gardeniers, Johannes G.E. ; van Enckevort, W.J.P. ; Elwenspoek, Michael Curt. / Network functions for representation of crystal growth and etch rates. 1998. Holten.
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    title = "Network functions for representation of crystal growth and etch rates",
    keywords = "METIS-114707",
    author = "{van Suchtelen}, J. and {van Veenendaal}, E. and A.J. Nijdam and Gardeniers, {Johannes G.E.} and {van Enckevort}, W.J.P. and Elwenspoek, {Michael Curt}",
    year = "1998",
    month = "5",
    day = "18",
    language = "Undefined",
    type = "Other",

    }

    van Suchtelen, J, van Veenendaal, E, Nijdam, AJ, Gardeniers, JGE, van Enckevort, WJP & Elwenspoek, MC 1998, Network functions for representation of crystal growth and etch rates. Holten.

    Network functions for representation of crystal growth and etch rates. / van Suchtelen, J.; van Veenendaal, E.; Nijdam, A.J.; Gardeniers, Johannes G.E.; van Enckevort, W.J.P.; Elwenspoek, Michael Curt.

    Holten. 1998, .

    Research output: Other contributionOther research output

    TY - GEN

    T1 - Network functions for representation of crystal growth and etch rates

    AU - van Suchtelen, J.

    AU - van Veenendaal, E.

    AU - Nijdam, A.J.

    AU - Gardeniers, Johannes G.E.

    AU - van Enckevort, W.J.P.

    AU - Elwenspoek, Michael Curt

    PY - 1998/5/18

    Y1 - 1998/5/18

    KW - METIS-114707

    M3 - Other contribution

    CY - Holten

    ER -

    van Suchtelen J, van Veenendaal E, Nijdam AJ, Gardeniers JGE, van Enckevort WJP, Elwenspoek MC. Network functions for representation of crystal growth and etch rates. 1998.