Network functions for representation of crystal growth and etch rates

J. van Suchtelen, E. van Veenendaal, A.J. Nijdam, Johannes G.E. Gardeniers, W.J.P. van Enckevort, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationHolten
    Publication statusPublished - 18 May 1998

    Keywords

    • METIS-114707

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