Network functions for representation of crystal growth and etch rates

J. van Suchtelen; E. van Veenendaal; A.J. Nijdam; Johannes G.E. Gardeniers; W.J.P. van Enckevort; Michael Curt Elwenspoek

Network functions for representation of crystal growth and etch rates

J. van Suchtelen, E. van Veenendaal, A.J. Nijdam, Johannes G.E. Gardeniers, W.J.P. van Enckevort, Michael Curt Elwenspoek

Research output: Other contribution › Other research output

Original language	Undefined
Place of Publication	Holten
Publication status	Published - 18 May 1998

Keywords

METIS-114707

Cite this

@misc{a5e4fef1f3b848a19329b9d1a72e24be,

title = "Network functions for representation of crystal growth and etch rates",

keywords = "METIS-114707",

author = "{van Suchtelen}, J. and {van Veenendaal}, E. and A.J. Nijdam and Gardeniers, {Johannes G.E.} and {van Enckevort}, W.J.P. and Elwenspoek, {Michael Curt}",

year = "1998",

month = may,

day = "18",

language = "Undefined",

type = "Other",

}