Network functions for representation of crystal growth and etch rates

J. van Suchtelen, E. van Veenendaal, A.J. Nijdam, Johannes G.E. Gardeniers, W.J.P. van Enckevort, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationHolten
    Publication statusPublished - 18 May 1998

    Keywords

    • METIS-114707

    Cite this

    van Suchtelen, J., van Veenendaal, E., Nijdam, A. J., Gardeniers, J. G. E., van Enckevort, W. J. P., & Elwenspoek, M. C. (1998, May 18). Network functions for representation of crystal growth and etch rates. Holten.