Network funtions for representaiton of crystal growth and etch rates

J. van Suchtelen; E. van Veenendaal; A.J. Nijdam; Johannes G.E. Gardeniers; W.J.P. van Enckevort; Michael Curt Elwenspoek

Network funtions for representaiton of crystal growth and etch rates

J. van Suchtelen, E. van Veenendaal, A.J. Nijdam, Johannes G.E. Gardeniers, W.J.P. van Enckevort, Michael Curt Elwenspoek

Research output: Other contribution › Other research output

Original language	Undefined
Place of Publication	Enschede
Publication status	Published - 23 Jun 1998

Keywords

METIS-114667

Cite this

@misc{a1e859d53e394ebcb91dfd8f9ac35116,

title = "Network funtions for representaiton of crystal growth and etch rates",

keywords = "METIS-114667",

author = "\{van Suchtelen\}, J. and \{van Veenendaal\}, E. and A.J. Nijdam and Gardeniers, \{Johannes G.E.\} and \{van Enckevort\}, W.J.P. and Elwenspoek, \{Michael Curt\}",

year = "1998",

month = jun,

day = "23",

language = "Undefined",

type = "Other",

}