Network parameter fitting of orientation dependent etching of silicon

E. van Veenendaal, J. van Suchtelen, K. Sato, W.J.P. van Enckevort, Michael Curt Elwenspoek

Research output: Other contribution › Other research output

Keywords

@misc{39943f1635bb497fb237f5157c487d3e,

title = "Network parameter fitting of orientation dependent etching of silicon",

keywords = "METIS-114704",

author = "\{van Veenendaal\}, E. and \{van Suchtelen\}, J. and K. Sato and \{van Enckevort\}, W.J.P. and Elwenspoek, \{Michael Curt\}",

year = "1998",

month = may,

day = "18",

language = "Undefined",

type = "Other",

}