New application of R.F.-sputtered glass films as protection and bonding layers in silicon micromachining

Johan W. Berenschot, Johannes G.E. Gardeniers, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 30 Jun 1994
Event	MESA Dag 1994 - Best Western Dish Hotel, Enschede, Netherlands Duration: 30 Jun 1994 → 30 Jun 1994

Keywords

This output contributes to the following UN Sustainable Development Goals (SDGs)

@conference{0bc2eae817824d278a84e466812f5610,

title = "New application of R.F.-sputtered glass films as protection and bonding layers in silicon micromachining",

keywords = "METIS-114651",

author = "Berenschot, {Johan W.} and Gardeniers, {Johannes G.E.} and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",

year = "1994",

month = jun,

day = "30",

language = "Undefined",

pages = "--",

note = "MESA Dag 1994 ; Conference date: 30-06-1994 Through 30-06-1994",

}