New approach for correction of distortions in spectral line profiles in Auger electron spectroscopy

A.G.B.M. Sasse, Herbert Wormeester, Arend van Silfhout

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Abstract

A new deconvolution method for Auger electron spectroscopy is presented. This method is based on a non-linear least squares minimizing routine (Levenberg-Marquardt) and global approximation using splines, solving many of the drawbacks inherent to the Van Cittert and Fourier transform based deconvolution methods. The deconvolution routine can be run on a personal computer. The application of this method goes beyond the electron spectroscopies and can be considered as a general deconvolution method.
Original languageUndefined
Pages (from-to)228-232
JournalSurface and interface analysis
Volume13
Issue number4
DOIs
Publication statusPublished - 1988

Keywords

  • IR-70853

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