Abstract
A new deconvolution method for Auger electron spectroscopy is presented. This method is based on a non-linear least squares minimizing routine (Levenberg-Marquardt) and global approximation using splines, solving many of the drawbacks inherent to the Van Cittert and Fourier transform based deconvolution methods. The deconvolution routine can be run on a personal computer. The application of this method goes beyond the electron spectroscopies and can be considered as a general deconvolution method.
Original language | Undefined |
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Pages (from-to) | 228-232 |
Journal | Surface and interface analysis |
Volume | 13 |
Issue number | 4 |
DOIs | |
Publication status | Published - 1988 |
Keywords
- IR-70853