New class of thermal flow sensors using ΔT = 0 as a control signal

T.S.J. Lammerink; N.R. Tas; G.J.M. Krijnen; M. Elwenspoek

doi:10.1109/MEMSYS.2000.838572

New class of thermal flow sensors using ΔT = 0 as a control signal

T.S.J. Lammerink, N.R. Tas, G.J.M. Krijnen, M. Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

34 Citations (Scopus)

5 Downloads (Pure)

Abstract

In this paper we propose a new anemometer principle. Next to the known Constant Power Anemometry (CPA) and the Constant Temperature Anemometry (CTA), here the Temperature Balanced Anemometry (TBA) is presented. A compact overview of thermal flow sensor system concepts is given. The new concept has important consequences on simple flow sensor calibration. The proposed concept is investigated using experiments on conventional thermal flow sensors. A micro flow sensor is presented in combination with an example of simple electronic interfacing circuitry.

Original language	English
Title of host publication	IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000
Subtitle of host publication	Miyazaki, Japan, January 23-27, 2000: Proceedings
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	525-530
Number of pages	6
ISBN (Print)	0-7803-5273-4, 0-7803-5274-2
DOIs	https://doi.org/10.1109/MEMSYS.2000.838572
Publication status	Published - 2000
Event	13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000 - Miyazaki, Japan Duration: 23 Jan 2000 → 27 Jan 2000 Conference number: 13

Conference

Conference	13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000
Abbreviated title	MEMS
Country/Territory	Japan
City	Miyazaki
Period	23/01/00 → 27/01/00

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10.1109/MEMSYS.2000.838572

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title = "New class of thermal flow sensors using ΔT = 0 as a control signal",

abstract = "In this paper we propose a new anemometer principle. Next to the known Constant Power Anemometry (CPA) and the Constant Temperature Anemometry (CTA), here the Temperature Balanced Anemometry (TBA) is presented. A compact overview of thermal flow sensor system concepts is given. The new concept has important consequences on simple flow sensor calibration. The proposed concept is investigated using experiments on conventional thermal flow sensors. A micro flow sensor is presented in combination with an example of simple electronic interfacing circuitry.",

author = "T.S.J. Lammerink and N.R. Tas and G.J.M. Krijnen and M. Elwenspoek",

year = "2000",

doi = "10.1109/MEMSYS.2000.838572",

language = "English",

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booktitle = "IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000",

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note = "13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000, MEMS ; Conference date: 23-01-2000 Through 27-01-2000",

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Lammerink, TSJ, Tas, NR , Krijnen, GJM & Elwenspoek, M 2000, New class of thermal flow sensors using ΔT = 0 as a control signal. in IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000: Miyazaki, Japan, January 23-27, 2000: Proceedings. IEEE, Piscataway, NJ, pp. 525-530, 13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000, Miyazaki, Japan, 23/01/00. https://doi.org/10.1109/MEMSYS.2000.838572

New class of thermal flow sensors using ΔT = 0 as a control signal. / Lammerink, T.S.J.; Tas, N.R.; Krijnen, G.J.M. et al.
IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000: Miyazaki, Japan, January 23-27, 2000: Proceedings. Piscataway, NJ: IEEE, 2000. p. 525-530.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AB - In this paper we propose a new anemometer principle. Next to the known Constant Power Anemometry (CPA) and the Constant Temperature Anemometry (CTA), here the Temperature Balanced Anemometry (TBA) is presented. A compact overview of thermal flow sensor system concepts is given. The new concept has important consequences on simple flow sensor calibration. The proposed concept is investigated using experiments on conventional thermal flow sensors. A micro flow sensor is presented in combination with an example of simple electronic interfacing circuitry.

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T2 - 13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000

Y2 - 23 January 2000 through 27 January 2000

ER -

New class of thermal flow sensors using ΔT = 0 as a control signal

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