New design methodologies in oriented silicon wafers

R.E. Oosterbroek, Johan W. Berenschot, Henricus V. Jansen, A.J. Nijdam, G. Pandraud, Michael Curt Elwenspoek

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationToulouse, France
    Publication statusPublished - 15 May 2000

    Keywords

    • METIS-114821

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