New design methodologies in oriented silicon wafers

R.E. Oosterbroek; Johan W. Berenschot; Henricus V. Jansen; A.J. Nijdam; G. Pandraud; Michael Curt Elwenspoek

New design methodologies in oriented silicon wafers

R.E. Oosterbroek
, Johan W. Berenschot
, Henricus V. Jansen
, A.J. Nijdam
, G. Pandraud
, Michael Curt Elwenspoek

Research output: Other contribution › Other research output

Original language	Undefined
Place of Publication	Toulouse, France
Publication status	Published - 15 May 2000

Keywords

METIS-114821

Cite this

@misc{39264b25ba2f414da9ca4d11f9710445,

title = "New design methodologies in oriented silicon wafers",

keywords = "METIS-114821",

author = "R.E. Oosterbroek and Berenschot, \{Johan W.\} and Jansen, \{Henricus V.\} and A.J. Nijdam and G. Pandraud and Elwenspoek, \{Michael Curt\}",

year = "2000",

month = may,

day = "15",

language = "Undefined",

type = "Other",

}