New developments in bulk micromachining by powder blasting

H. Wensink; Michael Curt Elwenspoek

New developments in bulk micromachining by powder blasting

H. Wensink, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of Micro Total Analysis Systems (MicroTAS)
Editors	J.M. Ramsey, Albert van den Berg
Place of Publication	Dordrecht
Publisher	Kluwer Academic Publishers
Pages	393-394
ISBN (Print)	1-4020-0148-7
Publication status	Published - 21 Oct 2001
Event	5th International Conference on Micro Total Analysis Systems, µTAS 2001 - Monterey, United States Duration: 21 Oct 2001 → 25 Oct 2001 Conference number: 5

Publication series

Name
Publisher	Kluwer Academic Publishers

Conference

Conference	5th International Conference on Micro Total Analysis Systems, µTAS 2001
Abbreviated title	MicroTAS
Country/Territory	United States
City	Monterey
Period	21/10/01 → 25/10/01

Keywords

IR-36002
METIS-200133

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Cite this

@inproceedings{9c3936d371ab4680add059d35ab4a321,

title = "New developments in bulk micromachining by powder blasting",

keywords = "IR-36002, METIS-200133",

author = "H. Wensink and Elwenspoek, {Michael Curt}",

year = "2001",

month = oct,

day = "21",

language = "Undefined",

isbn = "1-4020-0148-7",

publisher = "Kluwer Academic Publishers",

pages = "393--394",

editor = "J.M. Ramsey and {van den Berg}, Albert",

booktitle = "Proceedings of Micro Total Analysis Systems (MicroTAS)",

address = "Netherlands",

note = "5th International Conference on Micro Total Analysis Systems, µTAS 2001 ; Conference date: 21-10-2001 Through 25-10-2001",

}

New developments in bulk micromachining by powder blasting. / Wensink, H.; Elwenspoek, Michael Curt.
Proceedings of Micro Total Analysis Systems (MicroTAS). ed. / J.M. Ramsey; Albert van den Berg. Dordrecht: Kluwer Academic Publishers, 2001. p. 393-394.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - New developments in bulk micromachining by powder blasting

AU - Wensink, H.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 5

PY - 2001/10/21

Y1 - 2001/10/21

KW - IR-36002

KW - METIS-200133

M3 - Conference contribution

SN - 1-4020-0148-7

SP - 393

EP - 394

BT - Proceedings of Micro Total Analysis Systems (MicroTAS)

A2 - Ramsey, J.M.

A2 - van den Berg, Albert

PB - Kluwer Academic Publishers

CY - Dordrecht

T2 - 5th International Conference on Micro Total Analysis Systems, µTAS 2001

Y2 - 21 October 2001 through 25 October 2001

ER -