New developments in bulk micromachining by powder blasting

H. Wensink, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of Micro Total Analysis Systems (MicroTAS)
    EditorsJ.M. Ramsey, Albert van den Berg
    Place of PublicationDordrecht
    PublisherKluwer Academic Publishers
    Pages393-394
    ISBN (Print)1-4020-0148-7
    Publication statusPublished - 21 Oct 2001

    Publication series

    Name
    PublisherKluwer Academic Publishers

    Keywords

    • IR-36002
    • METIS-200133

    Cite this

    Wensink, H., & Elwenspoek, M. C. (2001). New developments in bulk micromachining by powder blasting. In J. M. Ramsey, & A. van den Berg (Eds.), Proceedings of Micro Total Analysis Systems (MicroTAS) (pp. 393-394). Dordrecht: Kluwer Academic Publishers.