New developments in wet chemical etching and fusion bonding

Michael Curt Elwenspoek, C. Gui

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Microstructures and Microfabricated Systems IV, Electrochemical society 194th meeting
Place of Publication	Boston, Massachusetts
Pages	192-205
Publication status	Published - 1 Nov 1998
Event	Microstructures and Microfabricated Systems IV, Electrochemical society 194th meeting - Duration: 1 Jan 1998 → 1 Jan 1998

Other	Microstructures and Microfabricated Systems IV, Electrochemical society 194th meeting
Period	1/01/98 → 1/01/98

Keywords

@inproceedings{2028294837934a9eaeb4c459981aa704,

title = "New developments in wet chemical etching and fusion bonding",

keywords = "METIS-112719, IR-15837",

author = "Elwenspoek, {Michael Curt} and C. Gui",

year = "1998",

month = nov,

day = "1",

language = "Undefined",

pages = "192--205",

booktitle = "Microstructures and Microfabricated Systems IV, Electrochemical society 194th meeting",

note = "Microstructures and Microfabricated Systems IV, Electrochemical society 194th meeting ; Conference date: 01-01-1998 Through 01-01-1998",

}

TY - GEN

T1 - New developments in wet chemical etching and fusion bonding

AU - Elwenspoek, Michael Curt

AU - Gui, C.

PY - 1998/11/1

Y1 - 1998/11/1

KW - METIS-112719

KW - IR-15837

M3 - Conference contribution

SP - 192

EP - 205

BT - Microstructures and Microfabricated Systems IV, Electrochemical society 194th meeting

CY - Boston, Massachusetts

T2 - Microstructures and Microfabricated Systems IV, Electrochemical society 194th meeting

Y2 - 1 January 1998 through 1 January 1998

ER -