@inproceedings{2028294837934a9eaeb4c459981aa704,
title = "New developments in wet chemical etching and fusion bonding",
keywords = "METIS-112719, IR-15837",
author = "Elwenspoek, {Michael Curt} and C. Gui",
year = "1998",
month = nov,
day = "1",
language = "Undefined",
pages = "192--205",
booktitle = "Microstructures and Microfabricated Systems IV, Electrochemical society 194th meeting",
note = "Microstructures and Microfabricated Systems IV, Electrochemical society 194th meeting ; Conference date: 01-01-1998 Through 01-01-1998",
}