New developments in wet chemical etching and fusion bonding

Michael Curt Elwenspoek, C. Gui

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationMicrostructures and Microfabricated Systems IV, Electrochemical society 194th meeting
    Place of PublicationBoston, Massachusetts
    Pages192-205
    Publication statusPublished - 1 Nov 1998
    EventMicrostructures and Microfabricated Systems IV, Electrochemical society 194th meeting -
    Duration: 1 Jan 19981 Jan 1998

    Other

    OtherMicrostructures and Microfabricated Systems IV, Electrochemical society 194th meeting
    Period1/01/981/01/98

    Keywords

    • METIS-112719
    • IR-15837

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