New method for an accurate determination of residual strain in polycrystalline silicon films by analysing resonant frequencies of micromachined beams

T. Ikehara, A.F. Zwijze, K. Ikeda

    Research output: Contribution to journalArticleAcademicpeer-review

    36 Citations (Scopus)
    Original languageUndefined
    Pages (from-to)55-60
    JournalJournal of micromechanics and microengineering
    Issue number11
    Publication statusPublished - 2001

    Keywords

    • METIS-200122

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