New Phenomenon of Slow Boron Diffusion from Spin-on-Dopant Source

P. Le Minh, [Unknown] Dao Khac An, [Unknown] Nguyen Duc Chien, J. Holleman, Albert van den Berg, P.H. Woerlee, Hans Wallinga

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationIWOMS '99
    Place of PublicationHanoi, Vietnam
    Pages517-520
    Number of pages4
    Publication statusPublished - 2 Nov 1999

    Keywords

    • IR-17076
    • METIS-113964

    Cite this

    Le Minh, P., Dao Khac An, U., Nguyen Duc Chien, U., Holleman, J., van den Berg, A., Woerlee, P. H., & Wallinga, H. (1999). New Phenomenon of Slow Boron Diffusion from Spin-on-Dopant Source. In IWOMS '99 (pp. 517-520). Hanoi, Vietnam.