@inproceedings{8f51bad6c047406089c54913c4f86ab7,
title = "New Phenomenon of Slow Boron Diffusion from Spin-on-Dopant Source",
keywords = "IR-17076, METIS-113964",
author = "\{Le Minh\}, P. and \{Dao Khac An\}, [Unknown] and \{Nguyen Duc Chien\}, [Unknown] and J. Holleman and \{van den Berg\}, Albert and P.H. Woerlee and Hans Wallinga",
year = "1999",
month = nov,
day = "2",
language = "Undefined",
pages = "517--520",
booktitle = "IWOMS '99",
note = "3rd International Workshop on Materials Science, IWOMS 1999 ; Conference date: 02-11-1999 Through 04-11-1999",
}