Nitridated B4C/La multilayer optics for 6.7nm

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Application of B4C/La multilayer optics for λ = 6.7 nm at near normal (1.5°) incidence in X-FELs1, next generation lithography, soft x-ray spectroscopy, fluorescence analysis and imaging requires improvement of the reflectance and bandwidth. The B4C/La interfaces suffer from intermixing and interlayer formation. By investigating the kinetic and optical properties of related compounds, we found that they can be passivated by nitridation, simultaneously increasing the optical contrast2,3. We observed that B4C is more readily nitridated by N2+ bombardment during or after growth than La, which apparently yields an equilibrium that involves dinitrogen complexes4. The loosely bound N or N2 in the La/B4C interface substrate partially diffuses into the adlayer, resulting in surfactant mediated growth5,6,7,8. Subsequent nitridation of the adlayer is observed, yielding nitridated interfaces of improved optical contrast that are also chemically inactive to LaB6 and LaC2 interlayer formation9. In effect, we enhanced the reflectivity and bandwidth in experimental multilayer optics by up to a factor of 1.3. Calculations show that even further bandwidth improvement can be achieved by replacing B4C with B and La with Th or U10.
Original languageEnglish
Number of pages1
Publication statusPublished - 14 Feb 2010
Event10th International Conference on the Physics of X-Ray Multilayer Structures (PXRMS) - Montana, USA
Duration: 14 Feb 201018 Feb 2010


Conference10th International Conference on the Physics of X-Ray Multilayer Structures (PXRMS)
CityMontana, USA


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