Nitridation and contrast of B4C/La interfaces and multilayer optics

T. Tsarfati, Robbert Wilhelmus Elisabeth van de Kruijs, E. Zoethout, Eric Louis, Frederik Bijkerk

Research output: Contribution to journalArticleAcademicpeer-review

25 Citations (Scopus)

Abstract

Chemical diffusion and interlayer formation in thin layers and at interfaces is of increasing influence in nanoscopic devices such as nano-electronics, magneto-optical storage and multilayer X-ray optics. We show that with the nitridation of reactive B4C/La interfaces, both the chemical and optical contrast can be greatly enhanced. Although interaction and diffusion of N2 from the substrate towards the adlayer does occur, this surfactant mediated growth contributes to chemical and optical interface properties that enable major reflectivity improvements of multilayer optics for 6.7 < λ < 7.0 nm.
Original languageEnglish
Pages (from-to)7249-7252
Number of pages4
JournalThin solid films
Volume518
Issue number24
DOIs
Publication statusPublished - 2010

Keywords

  • METIS-270381

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