Nitridation of interpoly dielectrics for non volatile memory application

H.J. Bergveld, J.H. Klootwijk, H. van Kranenburg, P.H. Woerlee

    Research output: Other contribution › Other research output

    Original languageUndefined
    Place of PublicationBest Western Dish Hotel, Enschede
    Publication statusPublished - 5 Jun 1996

    Keywords

    • METIS-114901

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