Nitridation of SiO2 layers in a RTP reactor for embedded applications

J.H. Klootwijk, H. van Kranenburg, P.H. Woerlee, Hans Wallinga

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationBest Western Dish Hotel, Enschede
    Publication statusPublished - 5 Jun 1996

    Keywords

    • METIS-114900

    Cite this

    Klootwijk, J. H., van Kranenburg, H., Woerlee, P. H., & Wallinga, H. (1996, Jun 5). Nitridation of SiO2 layers in a RTP reactor for embedded applications. Best Western Dish Hotel, Enschede.