Nitridation of SiO2 layers in a RTP reactor for embedded applications

J.H. Klootwijk, H. van Kranenburg, P.H. Woerlee, Hans Wallinga

    Research output: Other contribution › Other research output

    Original languageUndefined
    Place of PublicationBest Western Dish Hotel, Enschede
    Publication statusPublished - 5 Jun 1996

    Keywords

    • METIS-114900

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