Nitridation of SiO2 layers in a RTP reactor for embedded applications

  • J.H. Klootwijk
  • , H. van Kranenburg
  • , P.H. Woerlee
  • , Hans Wallinga

    Research output: Other contribution › Other research output

    Original languageUndefined
    Place of PublicationBest Western Dish Hotel, Enschede
    Publication statusPublished - 5 Jun 1996

    Keywords

    • METIS-114900

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