Non-degenerate parametric amplification and filtering in biomimetic hair flow sensors

H. Droogendijk, C.M. Bruinink, Remco G.P. Sanders, Gijsbertus J.M. Krijnen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    1 Citation (Scopus)

    Abstract

    We report non-degenerate parametric amplification in our biomimetic MEMS hair-based flow-sensors with improved responsivity and sharp filtering through AC-biasing. To the best of our knowledge, this is the first flow sensor with tunable filtering by non-degenerate electromechanical parametric amplification, applicable at a wide range of non-resonant frequencies and achieving highly selective gain of up to 20 dB.
    Original languageUndefined
    Title of host publication16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '11
    Place of PublicationUSA
    PublisherIEEE Circuits & Systems Society
    Pages2038-2041
    Number of pages4
    ISBN (Print)978-1-4577-0157-3
    DOIs
    Publication statusPublished - Jun 2011
    Event16th International Solid-State Sensors, Actuators and Microsystems Conference - China National Convention Center, Beijing, China
    Duration: 5 Jun 20119 Jun 2011
    Conference number: 16
    http://transducers11-beijing.org/

    Publication series

    Name
    PublisherIEEE Circuits & Systems Society

    Conference

    Conference16th International Solid-State Sensors, Actuators and Microsystems Conference
    Abbreviated titleTRANSDUCERS 2011
    CountryChina
    CityBeijing
    Period5/06/119/06/11
    Internet address

    Keywords

    • METIS-279156
    • Flow sensor
    • Bio-inspired
    • IR-78298
    • EWI-20241
    • non-degenerate
    • MEMS
    • TST-Life like
    • Parametric amplification

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