Abstract
We report non-degenerate parametric amplification in our biomimetic MEMS hair-based flow-sensors with improved responsivity and sharp filtering through AC-biasing. To the best of our knowledge, this is the first flow sensor with tunable filtering by non-degenerate electromechanical parametric amplification, applicable at a wide range of non-resonant frequencies and achieving highly selective gain of up to 20 dB.
Original language | Undefined |
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Title of host publication | 16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '11 |
Place of Publication | USA |
Publisher | IEEE |
Pages | 2038-2041 |
Number of pages | 4 |
ISBN (Print) | 978-1-4577-0157-3 |
DOIs | |
Publication status | Published - Jun 2011 |
Event | 16th International Solid-State Sensors, Actuators and Microsystems Conference - China National Convention Center, Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011 Conference number: 16 http://transducers11-beijing.org/ |
Publication series
Name | |
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Publisher | IEEE Circuits & Systems Society |
Conference
Conference | 16th International Solid-State Sensors, Actuators and Microsystems Conference |
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Abbreviated title | TRANSDUCERS 2011 |
Country/Territory | China |
City | Beijing |
Period | 5/06/11 → 9/06/11 |
Internet address |
Keywords
- METIS-279156
- Flow sensor
- Bio-inspired
- IR-78298
- EWI-20241
- non-degenerate
- MEMS
- TST-Life like
- Parametric amplification