Non-destructive test for anodic bonding characterisation of "thick" silicon nitride bonded to glass

B.H. Timmer, K.M. van Delft, T.D. Dermendjieva-Jansink, Wouter Olthuis, Piet Bergveld, Albert van den Berg

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings MME 2002
Place of Publication	Sinaia, Romania
Pages	339-341
Number of pages	3
Publication status	Published - 6 Oct 2002
Event	13th Micromechanics Europe Workshop, MME 2002 - Sinaia, Romania Duration: 6 Oct 2002 → 8 Oct 2002

Workshop	13th Micromechanics Europe Workshop, MME 2002
Abbreviated title	MME
Country/Territory	Romania
City	Sinaia
Period	6/10/02 → 8/10/02

Keywords

@inproceedings{afba449f908a495d98f1f0ff70053430,

title = "Non-destructive test for anodic bonding characterisation of {"}thick{"} silicon nitride bonded to glass",

keywords = "METIS-207404, IR-43786",

author = "B.H. Timmer and {van Delft}, K.M. and T.D. Dermendjieva-Jansink and Wouter Olthuis and Piet Bergveld and {van den Berg}, Albert",

year = "2002",

month = oct,

day = "6",

language = "Undefined",

isbn = "973-0-02472-3",

pages = "339--341",

booktitle = "Proceedings MME 2002",

note = "13th Micromechanics Europe Workshop, MME 2002 ; Conference date: 06-10-2002 Through 08-10-2002",

}

TY - GEN

T1 - Non-destructive test for anodic bonding characterisation of "thick" silicon nitride bonded to glass

AU - Timmer, B.H.

AU - van Delft, K.M.

AU - Dermendjieva-Jansink, T.D.

AU - Olthuis, Wouter

AU - Bergveld, Piet

AU - van den Berg, Albert

PY - 2002/10/6

Y1 - 2002/10/6

KW - METIS-207404

KW - IR-43786

M3 - Conference contribution

SN - 973-0-02472-3

SP - 339

EP - 341

BT - Proceedings MME 2002

CY - Sinaia, Romania

T2 - 13th Micromechanics Europe Workshop, MME 2002

Y2 - 6 October 2002 through 8 October 2002

ER -