Non-destructive test for anodic bonding characterisation of "thick" silicon nitride bonded to glass

B.H. Timmer, K.M. van Delft, T.D. Dermendjieva-Jansink, Wouter Olthuis, Piet Bergveld, Albert van den Berg

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 3 Oct 2002
    EventMESA+ Day 2002 - CC complex, University of Twente, Enschede, Netherlands
    Duration: 3 Oct 20023 Oct 2002

    Conference

    ConferenceMESA+ Day 2002
    CountryNetherlands
    CityEnschede
    Period3/10/023/10/02
    Other(MESA+ Meeting/Dag)

    Keywords

    • METIS-207411

    Cite this