Abstract
We demonstrate that the responsivity of flow sensors for harmonic flows can be improved significantly by non-resonant parametric amplification. Using electrostatic spring softening by AC-bias voltages, increased responsivity and sharp filtering are achieved in our biomimetic flow
sensors. Tunable filtering is obtained for non-resonant electromechanical parametric amplification, applicable at a wide range of non-resonant frequencies while achieving highly selective gain of up to 20 dB.
Original language | Undefined |
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Pages (from-to) | 213503 |
Number of pages | 3 |
Journal | Applied physics letters |
Volume | 99 |
Issue number | 21 |
DOIs | |
Publication status | Published - 21 Nov 2011 |
Keywords
- TST-Life like
- IR-78553
- METIS-281575
- EWI-20825