We demonstrate that the responsivity of flow sensors for harmonic flows can be improved significantly by non-resonant parametric amplification. Using electrostatic spring softening by AC-bias voltages, increased responsivity and sharp filtering are achieved in our biomimetic flow sensors. Tunable filtering is obtained for non-resonant electromechanical parametric amplification, applicable at a wide range of non-resonant frequencies while achieving highly selective gain of up to 20 dB.
|Number of pages||3|
|Journal||Applied physics letters|
|Publication status||Published - 21 Nov 2011|
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