Phase-matching devices for generation of blue light using Si [ 0] N and optically nonlinear c&x [ 4]arene layers are designed, fabricated and tested. The devices show second harmonic peak power of 17 mW at 472.9 nm and 4.5 W at 481.6 nm after 10 mm propagation length of a 1 mm broad beam using fundamental peak power of 200 W and 500 W, respectively. The strong requirements of noncritical phase match are fulfilled, in both design and realization, by the excellent process controllability of the passive SiON waveguides and the insensitivity of the devices towards technologically critical parameters, mainly the calix-arene layer thickness.
- second harmonic generation
- Silicon oxynitride
- phase match
Worhoff, K., Noordman, O. F. J., Noordman, O. F. J., Lambeck, P., van Hulst, N. F., & Albers, H. (1996). Noncritically phase-matched second harmonic generation of blue light in Si[O]N-calixarene slab type waveguides. Optics communications, 124(124), 493-499. https://doi.org/10.1016/0030-4018(95)00695-8