Nonlinearity and hysteresis of resonant strain gauges

Chengqun Gui, Rob Legtenberg, Harrie A.C. Tilmans, Jan H.J. Fluitman, Miko Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    192 Downloads (Pure)


    Nonlinearity and hysteresis effects of electrostatically activated, voltage driven resonant microbridges have been studied theoretically and experimentally. It is shown, that, in order to avoid vibration instability and hysteresis to occur, the choices of the ax. and d.c. driving voltages and of the quality factor of a resonator, with a given geometry and choice of materials, are limited by a hysteresis criterion. The limiting conditions are also formulated as hysteresis-free design rules. An expression for the maximum attainable figure of merit is also given. Experimental results, as obtained from electrostatically driven vacuum-encapsulated polysilicon microbridges, are presented and show good agreement with the theory.
    Original languageEnglish
    Title of host publicationIEEE Micro Electro Mechanical Systems, MEMS '95, Proceedings
    Place of PublicationPiscataway
    Number of pages6
    ISBN (Print)0-7803-2503-6
    Publication statusPublished - 29 Jan 1995
    EventIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995 - Amsterdam, Netherlands
    Duration: 29 Jan 19952 Feb 1995


    WorkshopIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995
    Abbreviated titleMEMS


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