Nonlinearity and hysteresis of resonant strain gauges

Chengqun Gui, Rob Legtenberg, Harrie A.C. Tilmans, Jan H.J. Fluitman, Miko Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    5 Citations (Scopus)
    71 Downloads (Pure)

    Abstract

    Nonlinearity and hysteresis effects of electrostatically activated, voltage driven resonant microbridges have been studied theoretically and experimentally. It is shown, that, in order to avoid vibration instability and hysteresis to occur, the choices of the ax. and d.c. driving voltages and of the quality factor of a resonator, with a given geometry and choice of materials, are limited by a hysteresis criterion. The limiting conditions are also formulated as hysteresis-free design rules. An expression for the maximum attainable figure of merit is also given. Experimental results, as obtained from electrostatically driven vacuum-encapsulated polysilicon microbridges, are presented and show good agreement with the theory.
    Original languageEnglish
    Title of host publicationIEEE Micro Electro Mechanical Systems, MEMS '95, Proceedings
    Place of PublicationPiscataway
    PublisherIEEE Computer Society
    Pages157-162
    Number of pages6
    ISBN (Print)0-7803-2503-6
    DOIs
    Publication statusPublished - 29 Jan 1995
    EventIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995 - Amsterdam, Netherlands
    Duration: 29 Jan 19952 Feb 1995

    Workshop

    WorkshopIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995
    Abbreviated titleMEMS
    CountryNetherlands
    CityAmsterdam
    Period29/01/952/02/95

    Fingerprint

    strain gages
    hysteresis
    nonlinearity
    electric potential
    figure of merit
    Q factors
    resonators
    vibration
    vacuum
    geometry

    Cite this

    Gui, C., Legtenberg, R., Tilmans, H. A. C., Fluitman, J. H. J., & Elwenspoek, M. (1995). Nonlinearity and hysteresis of resonant strain gauges. In IEEE Micro Electro Mechanical Systems, MEMS '95, Proceedings (pp. 157-162). Piscataway: IEEE Computer Society. https://doi.org/10.1109/MEMSYS.1995.472588
    Gui, Chengqun ; Legtenberg, Rob ; Tilmans, Harrie A.C. ; Fluitman, Jan H.J. ; Elwenspoek, Miko. / Nonlinearity and hysteresis of resonant strain gauges. IEEE Micro Electro Mechanical Systems, MEMS '95, Proceedings. Piscataway : IEEE Computer Society, 1995. pp. 157-162
    @inproceedings{937951a7b5ac4c4dbd7cd281d384e4aa,
    title = "Nonlinearity and hysteresis of resonant strain gauges",
    abstract = "Nonlinearity and hysteresis effects of electrostatically activated, voltage driven resonant microbridges have been studied theoretically and experimentally. It is shown, that, in order to avoid vibration instability and hysteresis to occur, the choices of the ax. and d.c. driving voltages and of the quality factor of a resonator, with a given geometry and choice of materials, are limited by a hysteresis criterion. The limiting conditions are also formulated as hysteresis-free design rules. An expression for the maximum attainable figure of merit is also given. Experimental results, as obtained from electrostatically driven vacuum-encapsulated polysilicon microbridges, are presented and show good agreement with the theory.",
    author = "Chengqun Gui and Rob Legtenberg and Tilmans, {Harrie A.C.} and Fluitman, {Jan H.J.} and Miko Elwenspoek",
    year = "1995",
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    doi = "10.1109/MEMSYS.1995.472588",
    language = "English",
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    Gui, C, Legtenberg, R, Tilmans, HAC, Fluitman, JHJ & Elwenspoek, M 1995, Nonlinearity and hysteresis of resonant strain gauges. in IEEE Micro Electro Mechanical Systems, MEMS '95, Proceedings. IEEE Computer Society, Piscataway, pp. 157-162, IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995, Amsterdam, Netherlands, 29/01/95. https://doi.org/10.1109/MEMSYS.1995.472588

    Nonlinearity and hysteresis of resonant strain gauges. / Gui, Chengqun; Legtenberg, Rob; Tilmans, Harrie A.C.; Fluitman, Jan H.J.; Elwenspoek, Miko.

    IEEE Micro Electro Mechanical Systems, MEMS '95, Proceedings. Piscataway : IEEE Computer Society, 1995. p. 157-162.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    AU - Legtenberg, Rob

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    AU - Fluitman, Jan H.J.

    AU - Elwenspoek, Miko

    PY - 1995/1/29

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    N2 - Nonlinearity and hysteresis effects of electrostatically activated, voltage driven resonant microbridges have been studied theoretically and experimentally. It is shown, that, in order to avoid vibration instability and hysteresis to occur, the choices of the ax. and d.c. driving voltages and of the quality factor of a resonator, with a given geometry and choice of materials, are limited by a hysteresis criterion. The limiting conditions are also formulated as hysteresis-free design rules. An expression for the maximum attainable figure of merit is also given. Experimental results, as obtained from electrostatically driven vacuum-encapsulated polysilicon microbridges, are presented and show good agreement with the theory.

    AB - Nonlinearity and hysteresis effects of electrostatically activated, voltage driven resonant microbridges have been studied theoretically and experimentally. It is shown, that, in order to avoid vibration instability and hysteresis to occur, the choices of the ax. and d.c. driving voltages and of the quality factor of a resonator, with a given geometry and choice of materials, are limited by a hysteresis criterion. The limiting conditions are also formulated as hysteresis-free design rules. An expression for the maximum attainable figure of merit is also given. Experimental results, as obtained from electrostatically driven vacuum-encapsulated polysilicon microbridges, are presented and show good agreement with the theory.

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    Gui C, Legtenberg R, Tilmans HAC, Fluitman JHJ, Elwenspoek M. Nonlinearity and hysteresis of resonant strain gauges. In IEEE Micro Electro Mechanical Systems, MEMS '95, Proceedings. Piscataway: IEEE Computer Society. 1995. p. 157-162 https://doi.org/10.1109/MEMSYS.1995.472588