Nonlinearity and hysteresis of resonant strain gauges

Chengqun Gui, Rob Legtenberg, Harrie A.C. Tilmans, Jan H.J. Fluitman, Miko Elwenspoek

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

5 Citations (Scopus)
69 Downloads (Pure)

Abstract

Nonlinearity and hysteresis effects of electrostatically activated, voltage driven resonant microbridges have been studied theoretically and experimentally. It is shown, that, in order to avoid vibration instability and hysteresis to occur, the choices of the ax. and d.c. driving voltages and of the quality factor of a resonator, with a given geometry and choice of materials, are limited by a hysteresis criterion. The limiting conditions are also formulated as hysteresis-free design rules. An expression for the maximum attainable figure of merit is also given. Experimental results, as obtained from electrostatically driven vacuum-encapsulated polysilicon microbridges, are presented and show good agreement with the theory.
Original languageEnglish
Title of host publicationIEEE Micro Electro Mechanical Systems, MEMS '95, Proceedings
Place of PublicationPiscataway
PublisherIEEE Computer Society
Pages157-162
Number of pages6
ISBN (Print)0-7803-2503-6
DOIs
Publication statusPublished - 29 Jan 1995
EventIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995 - Amsterdam, Netherlands
Duration: 29 Jan 19952 Feb 1995

Workshop

WorkshopIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995
Abbreviated titleMEMS
CountryNetherlands
CityAmsterdam
Period29/01/952/02/95

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strain gages
hysteresis
nonlinearity
electric potential
figure of merit
Q factors
resonators
vibration
vacuum
geometry

Cite this

Gui, C., Legtenberg, R., Tilmans, H. A. C., Fluitman, J. H. J., & Elwenspoek, M. (1995). Nonlinearity and hysteresis of resonant strain gauges. In IEEE Micro Electro Mechanical Systems, MEMS '95, Proceedings (pp. 157-162). Piscataway: IEEE Computer Society. https://doi.org/10.1109/MEMSYS.1995.472588
Gui, Chengqun ; Legtenberg, Rob ; Tilmans, Harrie A.C. ; Fluitman, Jan H.J. ; Elwenspoek, Miko. / Nonlinearity and hysteresis of resonant strain gauges. IEEE Micro Electro Mechanical Systems, MEMS '95, Proceedings. Piscataway : IEEE Computer Society, 1995. pp. 157-162
@inproceedings{937951a7b5ac4c4dbd7cd281d384e4aa,
title = "Nonlinearity and hysteresis of resonant strain gauges",
abstract = "Nonlinearity and hysteresis effects of electrostatically activated, voltage driven resonant microbridges have been studied theoretically and experimentally. It is shown, that, in order to avoid vibration instability and hysteresis to occur, the choices of the ax. and d.c. driving voltages and of the quality factor of a resonator, with a given geometry and choice of materials, are limited by a hysteresis criterion. The limiting conditions are also formulated as hysteresis-free design rules. An expression for the maximum attainable figure of merit is also given. Experimental results, as obtained from electrostatically driven vacuum-encapsulated polysilicon microbridges, are presented and show good agreement with the theory.",
author = "Chengqun Gui and Rob Legtenberg and Tilmans, {Harrie A.C.} and Fluitman, {Jan H.J.} and Miko Elwenspoek",
year = "1995",
month = "1",
day = "29",
doi = "10.1109/MEMSYS.1995.472588",
language = "English",
isbn = "0-7803-2503-6",
pages = "157--162",
booktitle = "IEEE Micro Electro Mechanical Systems, MEMS '95, Proceedings",
publisher = "IEEE Computer Society",
address = "United States",

}

Gui, C, Legtenberg, R, Tilmans, HAC, Fluitman, JHJ & Elwenspoek, M 1995, Nonlinearity and hysteresis of resonant strain gauges. in IEEE Micro Electro Mechanical Systems, MEMS '95, Proceedings. IEEE Computer Society, Piscataway, pp. 157-162, IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995, Amsterdam, Netherlands, 29/01/95. https://doi.org/10.1109/MEMSYS.1995.472588

Nonlinearity and hysteresis of resonant strain gauges. / Gui, Chengqun; Legtenberg, Rob; Tilmans, Harrie A.C.; Fluitman, Jan H.J.; Elwenspoek, Miko.

IEEE Micro Electro Mechanical Systems, MEMS '95, Proceedings. Piscataway : IEEE Computer Society, 1995. p. 157-162.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Nonlinearity and hysteresis of resonant strain gauges

AU - Gui, Chengqun

AU - Legtenberg, Rob

AU - Tilmans, Harrie A.C.

AU - Fluitman, Jan H.J.

AU - Elwenspoek, Miko

PY - 1995/1/29

Y1 - 1995/1/29

N2 - Nonlinearity and hysteresis effects of electrostatically activated, voltage driven resonant microbridges have been studied theoretically and experimentally. It is shown, that, in order to avoid vibration instability and hysteresis to occur, the choices of the ax. and d.c. driving voltages and of the quality factor of a resonator, with a given geometry and choice of materials, are limited by a hysteresis criterion. The limiting conditions are also formulated as hysteresis-free design rules. An expression for the maximum attainable figure of merit is also given. Experimental results, as obtained from electrostatically driven vacuum-encapsulated polysilicon microbridges, are presented and show good agreement with the theory.

AB - Nonlinearity and hysteresis effects of electrostatically activated, voltage driven resonant microbridges have been studied theoretically and experimentally. It is shown, that, in order to avoid vibration instability and hysteresis to occur, the choices of the ax. and d.c. driving voltages and of the quality factor of a resonator, with a given geometry and choice of materials, are limited by a hysteresis criterion. The limiting conditions are also formulated as hysteresis-free design rules. An expression for the maximum attainable figure of merit is also given. Experimental results, as obtained from electrostatically driven vacuum-encapsulated polysilicon microbridges, are presented and show good agreement with the theory.

U2 - 10.1109/MEMSYS.1995.472588

DO - 10.1109/MEMSYS.1995.472588

M3 - Conference contribution

SN - 0-7803-2503-6

SP - 157

EP - 162

BT - IEEE Micro Electro Mechanical Systems, MEMS '95, Proceedings

PB - IEEE Computer Society

CY - Piscataway

ER -

Gui C, Legtenberg R, Tilmans HAC, Fluitman JHJ, Elwenspoek M. Nonlinearity and hysteresis of resonant strain gauges. In IEEE Micro Electro Mechanical Systems, MEMS '95, Proceedings. Piscataway: IEEE Computer Society. 1995. p. 157-162 https://doi.org/10.1109/MEMSYS.1995.472588