Abstract
Nonlinearity and hysteresis effects of electrostatically
activated, voltage driven resonant microbridges have
been studied theoretically and experimentally. It is
shown, that, in order to avoid vibration instability and
hysteresis to occur, the choices of the ax. and d.c.
driving voltages and of the quality factor of a resonator,
with a given geometry and choice of materials, are
limited by a hysteresis criterion. The limiting conditions
are also formulated as hysteresis-free design rules. An
expression for the maximum attainable figure of merit is
also given. Experimental results, as obtained from
electrostatically driven vacuum-encapsulated polysilicon
microbridges, are presented and show good agreement
with the theory.
Original language | English |
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Title of host publication | IEEE Micro Electro Mechanical Systems, MEMS '95, Proceedings |
Place of Publication | Piscataway |
Publisher | IEEE |
Pages | 157-162 |
Number of pages | 6 |
ISBN (Print) | 0-7803-2503-6 |
DOIs | |
Publication status | Published - 29 Jan 1995 |
Event | IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995 - Amsterdam, Netherlands Duration: 29 Jan 1995 → 2 Feb 1995 |
Workshop
Workshop | IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995 |
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Abbreviated title | MEMS |
Country/Territory | Netherlands |
City | Amsterdam |
Period | 29/01/95 → 2/02/95 |