Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching

M. Domanski, R. Luttge*, E. Lamers, A. J.A. Winnubst, X. F. Walboomers, J. A. Jansen, J. G.E. Gardeniers

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

1 Citation (Scopus)
19 Downloads (Pure)

Abstract

Nanofeatures may enhance biofunctionality in implants, leading to a new generation of biomaterials with bone regeneration activity. To proof this hypothesis, we developed a nanofabrication method to achieve highly ordered nanoscale surface patterns on medical grade titanium. Thermal nanoimprint lithography and chlorine-based inductively-coupled plasma reactive ion etching were combined to produce nanogratings with smallest ridge- and groove feature sizes in the order of 150 nm. Silicon NIL stamps were fabricated using laser interference lithography and cryogenic inductively-coupled reactive ion etching in silicon with an aspect ratio (height to groove width) of 2.5 for the smallest grating pitch of 300 nm.

Original languageEnglish
Title of host publication14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
Pages518-520
Number of pages3
Publication statusPublished - 2010
Event14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 - Groningen, Netherlands
Duration: 3 Oct 20107 Oct 2010

Conference

Conference14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
Country/TerritoryNetherlands
CityGroningen
Period3/10/107/10/10

Keywords

  • Biofunctionality
  • Nanostructures
  • Titanium nanofabrication
  • 22/4 OA procedure

Fingerprint

Dive into the research topics of 'Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching'. Together they form a unique fingerprint.

Cite this