Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching

M. Domanski; R. Luttge; E. Lamers; A. J.A. Winnubst; X. F. Walboomers; J. A. Jansen; J. G.E. Gardeniers

Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching

M. Domanski
, R. Luttge^*
, E. Lamers
, A. J.A. Winnubst
, X. F. Walboomers
, J. A. Jansen
, J. G.E. Gardeniers

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

39 Downloads (Pure)

Abstract

Nanofeatures may enhance biofunctionality in implants, leading to a new generation of biomaterials with bone regeneration activity. To proof this hypothesis, we developed a nanofabrication method to achieve highly ordered nanoscale surface patterns on medical grade titanium. Thermal nanoimprint lithography and chlorine-based inductively-coupled plasma reactive ion etching were combined to produce nanogratings with smallest ridge- and groove feature sizes in the order of 150 nm. Silicon NIL stamps were fabricated using laser interference lithography and cryogenic inductively-coupled reactive ion etching in silicon with an aspect ratio (height to groove width) of 2.5 for the smallest grating pitch of 300 nm.

Original language	English
Title of host publication	14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
Pages	518-520
Number of pages	3
Publication status	Published - 2010
Event	14th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2010 - Groningen, Netherlands Duration: 3 Oct 2010 → 7 Oct 2010 Conference number: 14

Conference

Conference	14th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2010
Abbreviated title	MicroTAS 2010
Country/Territory	Netherlands
City	Groningen
Period	3/10/10 → 7/10/10

Keywords

Biofunctionality
Nanostructures
Titanium nanofabrication
22/4 OA procedure

Access to Document

180_0140Final published version, 1.74 MBLicence: Taverne

Cite this

@inproceedings{607e43135678443dae1b64632c1fea14,

title = "Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching",

abstract = "Nanofeatures may enhance biofunctionality in implants, leading to a new generation of biomaterials with bone regeneration activity. To proof this hypothesis, we developed a nanofabrication method to achieve highly ordered nanoscale surface patterns on medical grade titanium. Thermal nanoimprint lithography and chlorine-based inductively-coupled plasma reactive ion etching were combined to produce nanogratings with smallest ridge- and groove feature sizes in the order of 150 nm. Silicon NIL stamps were fabricated using laser interference lithography and cryogenic inductively-coupled reactive ion etching in silicon with an aspect ratio (height to groove width) of 2.5 for the smallest grating pitch of 300 nm.",

keywords = "Biofunctionality, Nanostructures, Titanium nanofabrication, 22/4 OA procedure",

author = "M. Domanski and R. Luttge and E. Lamers and Winnubst, \{A. J.A.\} and Walboomers, \{X. F.\} and Jansen, \{J. A.\} and Gardeniers, \{J. G.E.\}",

year = "2010",

language = "English",

isbn = "9781618390622",

pages = "518--520",

booktitle = "14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010",

note = "14th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2010, MicroTAS 2010 ; Conference date: 03-10-2010 Through 07-10-2010",

}

Domanski, M, Luttge, R, Lamers, E, Winnubst, AJA, Walboomers, XF, Jansen, JA & Gardeniers, JGE 2010, Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching. in 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010. pp. 518-520, 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2010, Groningen, Netherlands, 3/10/10.

Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching. / Domanski, M.; Luttge, R.; Lamers, E. et al.
14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010. 2010. p. 518-520.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching

AU - Domanski, M.

AU - Luttge, R.

AU - Lamers, E.

AU - Winnubst, A. J.A.

AU - Walboomers, X. F.

AU - Jansen, J. A.

AU - Gardeniers, J. G.E.

N1 - Conference code: 14

PY - 2010

Y1 - 2010

N2 - Nanofeatures may enhance biofunctionality in implants, leading to a new generation of biomaterials with bone regeneration activity. To proof this hypothesis, we developed a nanofabrication method to achieve highly ordered nanoscale surface patterns on medical grade titanium. Thermal nanoimprint lithography and chlorine-based inductively-coupled plasma reactive ion etching were combined to produce nanogratings with smallest ridge- and groove feature sizes in the order of 150 nm. Silicon NIL stamps were fabricated using laser interference lithography and cryogenic inductively-coupled reactive ion etching in silicon with an aspect ratio (height to groove width) of 2.5 for the smallest grating pitch of 300 nm.

AB - Nanofeatures may enhance biofunctionality in implants, leading to a new generation of biomaterials with bone regeneration activity. To proof this hypothesis, we developed a nanofabrication method to achieve highly ordered nanoscale surface patterns on medical grade titanium. Thermal nanoimprint lithography and chlorine-based inductively-coupled plasma reactive ion etching were combined to produce nanogratings with smallest ridge- and groove feature sizes in the order of 150 nm. Silicon NIL stamps were fabricated using laser interference lithography and cryogenic inductively-coupled reactive ion etching in silicon with an aspect ratio (height to groove width) of 2.5 for the smallest grating pitch of 300 nm.

KW - Biofunctionality

KW - Nanostructures

KW - Titanium nanofabrication

KW - 22/4 OA procedure

UR - https://www.scopus.com/pages/publications/84884328107

M3 - Conference contribution

AN - SCOPUS:84884328107

SN - 9781618390622

SP - 518

EP - 520

BT - 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010

T2 - 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences, µTAS 2010

Y2 - 3 October 2010 through 7 October 2010

ER -

Novel approach to produce nanopatterned titanium implants by combining nanoimprint lithography and reactive ion etching

Abstract

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Cite this