Novel integration of a microchannel with a silicon light emitting diode antifuse

P. Le Minh; J. Holleman; Hans Wallinga; Johan W. Berenschot; Niels Roelof Tas; Albert van den Berg

doi:10.1088/0960-1317/13/3/311

Novel integration of a microchannel with a silicon light emitting diode antifuse

P. Le Minh, J. Holleman, Hans Wallinga, Johan W. Berenschot, Niels Roelof Tas, Albert van den Berg

Research output: Contribution to journal › Article › Academic › peer-review

10 Citations (Scopus)

7 Downloads (Pure)

Abstract

Light emitting diode antifuses have been integrated into a microfluidic device that is realized with extended standard IC-compatible technological steps. The device comprises a microchannel sandwiched between a photodiode detector and a nanometre-scale diode antifuse light emitter. In this paper, the device fabrication process, working principle and properties and possible applications will be discussed. Changes in the interference fringe of the antifuse spectra due to the filling of the channel have been measured. Potential applications are electro-osmotic flow speed measurement, detection of absorptivity of liquids in the channel, detection of changes of the refractive index of the medium in the channel, e.g. air bubbles, particles in the liquid.

Original language	Undefined
Pages (from-to)	425-429
Number of pages	5
Journal	Journal of micromechanics and microengineering
Volume	13
Issue number	3
DOIs	https://doi.org/10.1088/0960-1317/13/3/311
Publication status	Published - May 2003

Keywords

METIS-215860
IR-46710
EWI-12298

Access to Document

10.1088/0960-1317/13/3/311

http://eprints.eemcs.utwente.nl/secure2/12298/01/JMM_13_425.pdf

Cite this

@article{aa738d4fa2604d85be317a10f0651809,

title = "Novel integration of a microchannel with a silicon light emitting diode antifuse",

abstract = "Light emitting diode antifuses have been integrated into a microfluidic device that is realized with extended standard IC-compatible technological steps. The device comprises a microchannel sandwiched between a photodiode detector and a nanometre-scale diode antifuse light emitter. In this paper, the device fabrication process, working principle and properties and possible applications will be discussed. Changes in the interference fringe of the antifuse spectra due to the filling of the channel have been measured. Potential applications are electro-osmotic flow speed measurement, detection of absorptivity of liquids in the channel, detection of changes of the refractive index of the medium in the channel, e.g. air bubbles, particles in the liquid.",

keywords = "METIS-215860, IR-46710, EWI-12298",

author = "{Le Minh}, P. and J. Holleman and Hans Wallinga and Berenschot, {Johan W.} and Tas, {Niels Roelof} and {van den Berg}, Albert",

year = "2003",

month = may,

doi = "10.1088/0960-1317/13/3/311",

language = "Undefined",

volume = "13",

pages = "425--429",

journal = "Journal of micromechanics and microengineering",

issn = "0960-1317",

publisher = "Institute of Physics (IOP)",

number = "3",

}

TY - JOUR

T1 - Novel integration of a microchannel with a silicon light emitting diode antifuse

AU - Le Minh, P.

AU - Holleman, J.

AU - Wallinga, Hans

AU - Berenschot, Johan W.

AU - Tas, Niels Roelof

AU - van den Berg, Albert

PY - 2003/5

Y1 - 2003/5

N2 - Light emitting diode antifuses have been integrated into a microfluidic device that is realized with extended standard IC-compatible technological steps. The device comprises a microchannel sandwiched between a photodiode detector and a nanometre-scale diode antifuse light emitter. In this paper, the device fabrication process, working principle and properties and possible applications will be discussed. Changes in the interference fringe of the antifuse spectra due to the filling of the channel have been measured. Potential applications are electro-osmotic flow speed measurement, detection of absorptivity of liquids in the channel, detection of changes of the refractive index of the medium in the channel, e.g. air bubbles, particles in the liquid.

AB - Light emitting diode antifuses have been integrated into a microfluidic device that is realized with extended standard IC-compatible technological steps. The device comprises a microchannel sandwiched between a photodiode detector and a nanometre-scale diode antifuse light emitter. In this paper, the device fabrication process, working principle and properties and possible applications will be discussed. Changes in the interference fringe of the antifuse spectra due to the filling of the channel have been measured. Potential applications are electro-osmotic flow speed measurement, detection of absorptivity of liquids in the channel, detection of changes of the refractive index of the medium in the channel, e.g. air bubbles, particles in the liquid.

KW - METIS-215860

KW - IR-46710

KW - EWI-12298

U2 - 10.1088/0960-1317/13/3/311

DO - 10.1088/0960-1317/13/3/311

M3 - Article

SN - 0960-1317

VL - 13

SP - 425

EP - 429

JO - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

IS - 3

ER -