Novel microstructures and technologies applied in chemical analysis techniques

Vincent L. Spiering, Johannes N. van der Moolen, Gert-Jan Burger, Albert van den Berg

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    18 Citations (Scopus)
    57 Downloads (Pure)

    Abstract

    Novel glass and silicon microstructures and their application in chemical analysis are presented. The micro technologies comprise (deep) dry etching, thin layer growth and anodic bonding. With this combination it is possible to create high resolution electrically isolating silicon dioxide structures with aspect ratio's similar to those possible in silicon. Main applications are chemical separation methods such as high performance liquid chromatography (HPLC) or electrophoresis (HPCE). Beside these channel structures, a capillary connector with very low dead and mixing volume has been designed and fabricated for use in (correlation) electrophoresis, and tested by means of precision of consecutive single injections
    Original languageEnglish
    Title of host publicationProceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
    Place of PublicationPiscataway, NJ
    PublisherIEEE
    Pages511-514
    ISBN (Print)0-7803-3829-4
    DOIs
    Publication statusPublished - 16 Jun 1997
    Event1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997 - Chicago, United States
    Duration: 16 Jun 199719 Jun 1997

    Conference

    Conference1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997
    Abbreviated titleTRANSDUCERS 97
    CountryUnited States
    CityChicago
    Period16/06/9719/06/97

    Keywords

    • Materials and technology
    • Chemical analysis
    • Fluid systems

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  • Cite this

    Spiering, V. L., van der Moolen, J. N., Burger, G-J., & van den Berg, A. (1997). Novel microstructures and technologies applied in chemical analysis techniques. In Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) (pp. 511-514). Piscataway, NJ: IEEE. https://doi.org/10.1109/SENSOR.1997.613699