Novel microstructures and technologies applied in chemical analysis techniques

Vincent L. Spiering, Johannes N. van der Moolen, Gert-Jan Burger, Albert van den Berg

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

18 Citations (Scopus)
38 Downloads (Pure)

Abstract

Novel glass and silicon microstructures and their application in chemical analysis are presented. The micro technologies comprise (deep) dry etching, thin layer growth and anodic bonding. With this combination it is possible to create high resolution electrically isolating silicon dioxide structures with aspect ratio's similar to those possible in silicon. Main applications are chemical separation methods such as high performance liquid chromatography (HPLC) or electrophoresis (HPCE). Beside these channel structures, a capillary connector with very low dead and mixing volume has been designed and fabricated for use in (correlation) electrophoresis, and tested by means of precision of consecutive single injections
Original languageEnglish
Title of host publicationProceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages511-514
ISBN (Print)0-7803-3829-4
DOIs
Publication statusPublished - 16 Jun 1997
Event1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997 - Chicago, United States
Duration: 16 Jun 199719 Jun 1997

Conference

Conference1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997
Abbreviated titleTRANSDUCERS 97
CountryUnited States
CityChicago
Period16/06/9719/06/97

Fingerprint

Silicon
Electrophoresis
Microstructure
Dry etching
High performance liquid chromatography
Chemical analysis
Silicon Dioxide
Aspect ratio
Glass

Keywords

  • Materials and technology
  • Chemical analysis
  • Fluid systems

Cite this

Spiering, V. L., van der Moolen, J. N., Burger, G-J., & van den Berg, A. (1997). Novel microstructures and technologies applied in chemical analysis techniques. In Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) (pp. 511-514). Piscataway, NJ: IEEE. https://doi.org/10.1109/SENSOR.1997.613699
Spiering, Vincent L. ; van der Moolen, Johannes N. ; Burger, Gert-Jan ; van den Berg, Albert. / Novel microstructures and technologies applied in chemical analysis techniques. Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97). Piscataway, NJ : IEEE, 1997. pp. 511-514
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Spiering, VL, van der Moolen, JN, Burger, G-J & van den Berg, A 1997, Novel microstructures and technologies applied in chemical analysis techniques. in Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97). IEEE, Piscataway, NJ, pp. 511-514, 1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997, Chicago, United States, 16/06/97. https://doi.org/10.1109/SENSOR.1997.613699

Novel microstructures and technologies applied in chemical analysis techniques. / Spiering, Vincent L.; van der Moolen, Johannes N.; Burger, Gert-Jan; van den Berg, Albert.

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97). Piscataway, NJ : IEEE, 1997. p. 511-514.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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N2 - Novel glass and silicon microstructures and their application in chemical analysis are presented. The micro technologies comprise (deep) dry etching, thin layer growth and anodic bonding. With this combination it is possible to create high resolution electrically isolating silicon dioxide structures with aspect ratio's similar to those possible in silicon. Main applications are chemical separation methods such as high performance liquid chromatography (HPLC) or electrophoresis (HPCE). Beside these channel structures, a capillary connector with very low dead and mixing volume has been designed and fabricated for use in (correlation) electrophoresis, and tested by means of precision of consecutive single injections

AB - Novel glass and silicon microstructures and their application in chemical analysis are presented. The micro technologies comprise (deep) dry etching, thin layer growth and anodic bonding. With this combination it is possible to create high resolution electrically isolating silicon dioxide structures with aspect ratio's similar to those possible in silicon. Main applications are chemical separation methods such as high performance liquid chromatography (HPLC) or electrophoresis (HPCE). Beside these channel structures, a capillary connector with very low dead and mixing volume has been designed and fabricated for use in (correlation) electrophoresis, and tested by means of precision of consecutive single injections

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Spiering VL, van der Moolen JN, Burger G-J, van den Berg A. Novel microstructures and technologies applied in chemical analysis techniques. In Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97). Piscataway, NJ: IEEE. 1997. p. 511-514 https://doi.org/10.1109/SENSOR.1997.613699