Novel RF-MEMS capacitive switching structures

X. Rottenberg, H.V. Jansen, P. Fiorini, W. De Raedt, H.A.C. Tilmans

Research output: Contribution to conferencePaperAcademicpeer-review

33 Citations (Scopus)
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Abstract

This paper reports on novel RF-MEMS capacitive switching devices implementing an electrically floating metal layer covering the dielectric to ensure intimate contact with the bridge in the down state. This results in an optimal switch down capacitance and allows optimisation of the down/up capacitance ratio all that are not possible with standard characteristics compared to standard RF-MEMS capacitive switches, in the frequency range from 1 to 30 GHz. Down/up capacitance ratios higher than 450 have been measured, an improvement of a factor 34 over standard designs with equal size and using the same materials.
Original languageEnglish
Pages1-4
Number of pages4
DOIs
Publication statusPublished - 23 Sep 2002
Event32nd European Microwave Conference, EuMC 2002 - Milan, Italy
Duration: 23 Sep 200226 Sep 2002
Conference number: 32

Conference

Conference32nd European Microwave Conference, EuMC 2002
Abbreviated titleEuMC
CountryItaly
CityMilan
Period23/09/0226/09/02

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MEMS
Capacitance
Switches
Metals

Cite this

Rottenberg, X., Jansen, H. V., Fiorini, P., De Raedt, W., & Tilmans, H. A. C. (2002). Novel RF-MEMS capacitive switching structures. 1-4. Paper presented at 32nd European Microwave Conference, EuMC 2002, Milan, Italy. https://doi.org/10.1109/EUMA.2002.339408
Rottenberg, X. ; Jansen, H.V. ; Fiorini, P. ; De Raedt, W. ; Tilmans, H.A.C. / Novel RF-MEMS capacitive switching structures. Paper presented at 32nd European Microwave Conference, EuMC 2002, Milan, Italy.4 p.
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Rottenberg, X, Jansen, HV, Fiorini, P, De Raedt, W & Tilmans, HAC 2002, 'Novel RF-MEMS capacitive switching structures' Paper presented at 32nd European Microwave Conference, EuMC 2002, Milan, Italy, 23/09/02 - 26/09/02, pp. 1-4. https://doi.org/10.1109/EUMA.2002.339408

Novel RF-MEMS capacitive switching structures. / Rottenberg, X.; Jansen, H.V.; Fiorini, P.; De Raedt, W.; Tilmans, H.A.C.

2002. 1-4 Paper presented at 32nd European Microwave Conference, EuMC 2002, Milan, Italy.

Research output: Contribution to conferencePaperAcademicpeer-review

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AU - Rottenberg, X.

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AB - This paper reports on novel RF-MEMS capacitive switching devices implementing an electrically floating metal layer covering the dielectric to ensure intimate contact with the bridge in the down state. This results in an optimal switch down capacitance and allows optimisation of the down/up capacitance ratio all that are not possible with standard characteristics compared to standard RF-MEMS capacitive switches, in the frequency range from 1 to 30 GHz. Down/up capacitance ratios higher than 450 have been measured, an improvement of a factor 34 over standard designs with equal size and using the same materials.

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DO - 10.1109/EUMA.2002.339408

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Rottenberg X, Jansen HV, Fiorini P, De Raedt W, Tilmans HAC. Novel RF-MEMS capacitive switching structures. 2002. Paper presented at 32nd European Microwave Conference, EuMC 2002, Milan, Italy. https://doi.org/10.1109/EUMA.2002.339408