Novel RF power sensor based on capacitive MEMS technology

L.J. Fernandez, Eelke Visser, Javier Sesé, Henry Jansen, Remco Wiegerink, Jaap Flokstra

    Research output: Contribution to conferencePosterOther research output

    Original languageEnglish
    Publication statusPublished - 2 Nov 2003
    Event14th MicroMechanics Europe Workshop, MME 2003 - Delft, Netherlands
    Duration: 2 Nov 20034 Nov 2003
    Conference number: 14

    Conference

    Conference14th MicroMechanics Europe Workshop, MME 2003
    Abbreviated titleMME
    CountryNetherlands
    CityDelft
    Period2/11/034/11/03

    Keywords

    • "Through"
    • Radio frequency (RF)
    • Power sensor
    • Capacitance readout
    • MEMS

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