Novel rf power sensor based on capacitive MEMS technology

L.J. Fernandez, E. Visser, J. Sesé, H. Jansen, Remco J. Wiegerink, Jakob Flokstra

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 2 Nov 2003
    Event14th MicroMechanics Europe Workshop 2003 - Delft, Netherlands
    Duration: 2 Nov 20034 Nov 2003
    Conference number: 14

    Conference

    Conference14th MicroMechanics Europe Workshop 2003
    Abbreviated titleMME 2003
    CountryNetherlands
    CityDelft
    Period2/11/034/11/03

    Keywords

    • METIS-214692

    Cite this

    Fernandez, L. J., Visser, E., Sesé, J., Jansen, H., Wiegerink, R. J., & Flokstra, J. (2003). Novel rf power sensor based on capacitive MEMS technology. -. Poster session presented at 14th MicroMechanics Europe Workshop 2003, Delft, Netherlands.
    Fernandez, L.J. ; Visser, E. ; Sesé, J. ; Jansen, H. ; Wiegerink, Remco J. ; Flokstra, Jakob. / Novel rf power sensor based on capacitive MEMS technology. Poster session presented at 14th MicroMechanics Europe Workshop 2003, Delft, Netherlands.
    @conference{69494b031cae4f998622694be3b2c40f,
    title = "Novel rf power sensor based on capacitive MEMS technology",
    keywords = "METIS-214692",
    author = "L.J. Fernandez and E. Visser and J. Ses{\'e} and H. Jansen and Wiegerink, {Remco J.} and Jakob Flokstra",
    year = "2003",
    month = "11",
    day = "2",
    language = "Undefined",
    pages = "--",
    note = "null ; Conference date: 02-11-2003 Through 04-11-2003",

    }

    Fernandez, LJ, Visser, E, Sesé, J, Jansen, H, Wiegerink, RJ & Flokstra, J 2003, 'Novel rf power sensor based on capacitive MEMS technology' 14th MicroMechanics Europe Workshop 2003, Delft, Netherlands, 2/11/03 - 4/11/03, pp. -.

    Novel rf power sensor based on capacitive MEMS technology. / Fernandez, L.J.; Visser, E.; Sesé, J.; Jansen, H.; Wiegerink, Remco J.; Flokstra, Jakob.

    2003. - Poster session presented at 14th MicroMechanics Europe Workshop 2003, Delft, Netherlands.

    Research output: Contribution to conferencePosterOther research output

    TY - CONF

    T1 - Novel rf power sensor based on capacitive MEMS technology

    AU - Fernandez, L.J.

    AU - Visser, E.

    AU - Sesé, J.

    AU - Jansen, H.

    AU - Wiegerink, Remco J.

    AU - Flokstra, Jakob

    PY - 2003/11/2

    Y1 - 2003/11/2

    KW - METIS-214692

    M3 - Poster

    SP - -

    ER -

    Fernandez LJ, Visser E, Sesé J, Jansen H, Wiegerink RJ, Flokstra J. Novel rf power sensor based on capacitive MEMS technology. 2003. Poster session presented at 14th MicroMechanics Europe Workshop 2003, Delft, Netherlands.