Novel rf power sensor based on capacitive MEMS technology

L.J. Fernandez, E. Visser, J. Sesé, H. Jansen, Remco J. Wiegerink, Jakob Flokstra

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 2 Nov 2003
    Event14th MicroMechanics Europe Workshop 2003 - Delft, Netherlands
    Duration: 2 Nov 20034 Nov 2003
    Conference number: 14

    Conference

    Conference14th MicroMechanics Europe Workshop 2003
    Abbreviated titleMME 2003
    CountryNetherlands
    CityDelft
    Period2/11/034/11/03

    Keywords

    • METIS-214692

    Cite this

    Fernandez, L. J., Visser, E., Sesé, J., Jansen, H., Wiegerink, R. J., & Flokstra, J. (2003). Novel rf power sensor based on capacitive MEMS technology. -. Poster session presented at 14th MicroMechanics Europe Workshop 2003, Delft, Netherlands.