Novel RF power sensor based on capacitive MEMS technology

L.J. Fernandez, Eelke Visser, Javier Sesé, Henry Jansen, Remco Wiegerink, Jaap Flokstra

Research output: Contribution to conference › Poster › Other research output

Original language	English
Publication status	Published - 2 Nov 2003
Event	14th MicroMechanics Europe Workshop, MME 2003 - Delft, Netherlands Duration: 2 Nov 2003 → 4 Nov 2003 Conference number: 14

Conference	14th MicroMechanics Europe Workshop, MME 2003
Abbreviated title	MME
Country/Territory	Netherlands
City	Delft
Period	2/11/03 → 4/11/03

Keywords

@conference{69494b031cae4f998622694be3b2c40f,

title = "Novel RF power sensor based on capacitive MEMS technology",

keywords = "{"}Through{"}, Radio frequency (RF), Power sensor, Capacitance readout, MEMS",

author = "L.J. Fernandez and Eelke Visser and Javier Ses{\'e} and Henry Jansen and Remco Wiegerink and Jaap Flokstra",

year = "2003",

month = nov,

day = "2",

language = "English",

note = "14th MicroMechanics Europe Workshop, MME 2003, MME ; Conference date: 02-11-2003 Through 04-11-2003",

}

TY - CONF

T1 - Novel RF power sensor based on capacitive MEMS technology

AU - Fernandez, L.J.

AU - Visser, Eelke

AU - Sesé, Javier

AU - Jansen, Henry

AU - Wiegerink, Remco

AU - Flokstra, Jaap

N1 - Conference code: 14

PY - 2003/11/2

Y1 - 2003/11/2

KW - "Through"

KW - Radio frequency (RF)

KW - Power sensor

KW - Capacitance readout

KW - MEMS

M3 - Poster

T2 - 14th MicroMechanics Europe Workshop, MME 2003

Y2 - 2 November 2003 through 4 November 2003

ER -